Conductive film
First Claim
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1. A conductive film comprising:
- an elongated film base, a first conductive layer, a second conductive layer and a third conductive layer in this order,the elongated film base having a longitudinal direction and a width direction orthogonal to the longitudinal direction,the width direction dimension of the elongated film base is greater than or equal to 1 m,the first conductive layer being an indium-based oxide layer,the second conductive layer being a metal layer,the third conductive layer being an oxidized metal layer having a thickness of 1 nm to 15nm formed by sputter deposition,wherein a surface resistance value is 0.1Ω
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to 0.6Ω
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, anda standard deviation of a surface resistance value in the with direction is less than or equal to 0.01Ω
/□
.
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Abstract
A conductive film includes an elongated film base, a first conductive layer, a second conductive layer and a third conductive layer in this order. The elongated film base has a longitudinal direction and a width direction orthogonal to the longitudinal direction. The width direction dimension of the elongated film base is greater than or equal to 1 m. The first conductive layer is an indium-based oxide layer. The second conductive layer is a metal layer. The third conductive layer is an oxidized metal layer having a thickness of 1 nm to 15 nm formed by sputter deposition.
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Citations
11 Claims
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1. A conductive film comprising:
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an elongated film base, a first conductive layer, a second conductive layer and a third conductive layer in this order, the elongated film base having a longitudinal direction and a width direction orthogonal to the longitudinal direction, the width direction dimension of the elongated film base is greater than or equal to 1 m, the first conductive layer being an indium-based oxide layer, the second conductive layer being a metal layer, the third conductive layer being an oxidized metal layer having a thickness of 1 nm to 15nm formed by sputter deposition, wherein a surface resistance value is 0.1Ω
/□
to 0.6Ω
/□
, anda standard deviation of a surface resistance value in the with direction is less than or equal to 0.01Ω
/□
. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification