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Observation device and observation method

  • US 9,305,343 B2
  • Filed: 04/11/2014
  • Issued: 04/05/2016
  • Est. Priority Date: 04/12/2013
  • Status: Active Grant
First Claim
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1. An observation method comprising:

  • acquiring a plurality of captured images of a same position on a sample;

    extracting one or more regions to be observed from among the plurality of captured images acquired in the acquiring a plurality of captured images;

    classifying the one or more regions to be observed extracted in the extracting one or more regions to be observed; and

    integrating the plurality of captured images and generating an integrated image by selecting an integration method from a plurality of predetermined integration methods based on a classification result of the classifying the one or more regions to be observed, wherein said selecting an integration method further comprises selecting one of a weighted sum processing with difference information integration method, a weighted sum processing without difference information integration method, and a weighted sum after brightness adjustment integration method to be performed, based on at least whether or not the one or more regions are present at an upper side of a pattern and a relative brightness of said pattern.

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