Observation device and observation method
First Claim
Patent Images
1. An observation method comprising:
- acquiring a plurality of captured images of a same position on a sample;
extracting one or more regions to be observed from among the plurality of captured images acquired in the acquiring a plurality of captured images;
classifying the one or more regions to be observed extracted in the extracting one or more regions to be observed; and
integrating the plurality of captured images and generating an integrated image by selecting an integration method from a plurality of predetermined integration methods based on a classification result of the classifying the one or more regions to be observed, wherein said selecting an integration method further comprises selecting one of a weighted sum processing with difference information integration method, a weighted sum processing without difference information integration method, and a weighted sum after brightness adjustment integration method to be performed, based on at least whether or not the one or more regions are present at an upper side of a pattern and a relative brightness of said pattern.
2 Assignments
0 Petitions
Accused Products
Abstract
A plurality of images is captured, and the plurality of images is integrated and displayed after one or more ROIs included in the captured images are extracted and classified. At integration, an integration method is controlled according to a classification result of the ROI.
-
Citations
14 Claims
-
1. An observation method comprising:
-
acquiring a plurality of captured images of a same position on a sample; extracting one or more regions to be observed from among the plurality of captured images acquired in the acquiring a plurality of captured images; classifying the one or more regions to be observed extracted in the extracting one or more regions to be observed; and integrating the plurality of captured images and generating an integrated image by selecting an integration method from a plurality of predetermined integration methods based on a classification result of the classifying the one or more regions to be observed, wherein said selecting an integration method further comprises selecting one of a weighted sum processing with difference information integration method, a weighted sum processing without difference information integration method, and a weighted sum after brightness adjustment integration method to be performed, based on at least whether or not the one or more regions are present at an upper side of a pattern and a relative brightness of said pattern. - View Dependent Claims (2, 3, 4, 5, 6, 11, 13)
-
-
7. An observation device comprising:
-
an image acquisition unit configured to capture a sample and to acquire a plurality of captured images of a same position on said sample; a region to be observed extraction unit configured to extract one or more regions to be observed from the plurality of captured images acquired in the image acquisition unit; a region to be observed classification unit configured to classify the one or more regions to be observed extracted in the region to be observed extraction unit; and an image integration unit configured to integrate the plurality of captured images to generate an integrated image by selecting an integration method from a plurality of predetermined integration methods based on a classification result of the region to be observed classification unit, wherein said selecting an integration method further comprises selecting one of a weighted sum processing with difference information integration method, a weighted sum processing without difference information integration method, and a weighted sum after brightness adjustment integration method to be performed, based on at least whether or not the one or more regions are present at an upper side of a pattern and a relative brightness of said pattern. - View Dependent Claims (8, 9, 10, 12, 14)
-
Specification