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Interposer for MEMS-on-lid microphone

  • US 9,307,328 B2
  • Filed: 01/06/2015
  • Issued: 04/05/2016
  • Est. Priority Date: 01/09/2014
  • Status: Active Grant
First Claim
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1. A microphone, the microphone comprising:

  • an interposer, the interposer including a first wall, a second wall, a third wall, and a fourth wall, wherein the first wall is opposite the second wall and the third wall is opposite the fourth wall, the first wall, second wall, third wall and fourth wall forming a cavity, the interposer further including a first side and a second side, the first side and the second side being opposite from each other and orthogonal to the first wall, second wall, third wall, and fourth wall, wherein the first side is plated with a first metallic material and the second side is plated with a second metallic material to provide an acoustic seal;

    a lid coupled to the first side of the interposer;

    a base coupled to the second side of the interposer such that the lid and the base enclose the cavity;

    a microelectromechanical system (MEMS) device disposed in the cavity;

    such that the interposer structurally supports one or both of the lid and the base, the interposer including a plurality of plated regions that are configured to electrically connect the lid and the base, the plated regions being configured to at least partially be exposed and open to the cavity.

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