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Angular rate sensor with quadrature error compensation

  • US 9,310,202 B2
  • Filed: 07/09/2012
  • Issued: 04/12/2016
  • Est. Priority Date: 07/09/2012
  • Status: Active Grant
First Claim
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1. An angular rate sensor comprising:

  • a substrate;

    a drive mass flexibly coupled to said substrate, said drive mass including first and second regions separated by an axis of rotation oriented parallel to a surface of said substrate;

    a sense mass suspended above said substrate and flexibly connected to said drive mass via flexible support elements, said sense mass including third and fourth regions separated by said axis of rotation, said first and third regions being laterally disposed on a first side of said axis of rotation, and said second and fourth regions being laterally disposed on a second side of said axis of rotation;

    a first electrode associated with said drive mass and disposed beneath said first region; and

    a second electrode associated with said sense mass and disposed beneath said fourth region, said second electrode being electrically coupled to said first electrode in reverse polarity so that a first error component between said first electrode and said drive mass substantially cancels a second error component between said second electrode and said sense mass.

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