Systems, devices, and methods including a dark-field reflected-illumination apparatus
First Claim
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1. A method of modulating a specimen-background dark-field micrograph contrast, comprising:
- varying an illumination-collection spacing by varying at least one of an illumination angle of incidence or a collection aperture dimension, based on a detected dark-field contrast differential.
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Abstract
Systems, devices, and methods are described that modulate a specimen-background dark-field micrograph contrast.
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8 Claims
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1. A method of modulating a specimen-background dark-field micrograph contrast, comprising:
varying an illumination-collection spacing by varying at least one of an illumination angle of incidence or a collection aperture dimension, based on a detected dark-field contrast differential. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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