Laser-type gas analyzer
First Claim
1. A laser-type gas analyzer, comprising:
- a mid-infrared laser light-emitting unit that emits laser light of a wavelength band of a mid-infrared region that includes an optical absorption spectrum of a first gas to be measured;
a mid-infrared laser driving unit that drives the mid-infrared laser light-emitting unit;
a mid-infrared laser optical unit that collimates the laser light emitted by the mid-infrared laser light-emitting unit, and irradiates the light into a space to be measured in which the first gas to be measured is present;
a mid-infrared light-receiving unit that receives the laser light irradiated by the mid-infrared laser optical unit, and outputs the received laser light as an electrical mid-infrared light reception signal;
a mid-infrared light reception signal processing and computing unit that extracts, from the mid-infrared light reception signal, a signal component affected by optical absorption by the first gas to be measured, and calculates a gas concentration of the first gas to be measured on the basis of an amount of change of this signal component;
a near-infrared laser light-emitting unit that emits, at respective times, first laser light of a wavelength band of a near-infrared region that includes an optical absorption spectrum of a second gas to be measured, second laser light of a wavelength band of a near-infrared region that includes an optical absorption spectrum of water, and third laser light of a wavelength band of a near-infrared region in which the optical absorption spectra of water, the first gas to be measured and the second gas to be measured are equal to or smaller than a predetermined amount;
a near-infrared laser driving unit that drives the near-infrared laser light-emitting unit;
a near-infrared laser optical unit that collimates, at respective times, the first, second and third laser light emitted by the near-infrared laser light-emitting unit, and irradiates the collimated light to the space to be measured;
a near-infrared light-receiving unit that receives, at respective times, the first, second and third laser light irradiated by the near-infrared laser optical unit, and outputs the received light as respective electrical near-infrared light reception signals;
a near-infrared light reception signal processing and computing unit that performs, at respective times, processes of extracting, from the near-infrared light reception signal of the first laser light, a signal component affected by optical absorption by the second gas to be measured, and computing a gas concentration of the second gas to be measured on the basis of an amount of change of this signal component, computing a water concentration in the space on the basis of the near-infrared light reception signal of the second laser light, and computing a light amount decrement due to dust on the basis of the near-infrared light reception signal of the third laser light; and
a gas concentration correcting unit that corrects the gas concentration of the first gas to be measured, as worked out by the mid-infrared light reception signal processing and computing unit and the gas concentration of the second gas to be measured, as worked out by the near-infrared light reception signal processing and computing unit, in use of the water concentration and light amount decrement as worked out by the near-infrared light reception signal processing and computing unit.
1 Assignment
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Accused Products
Abstract
Aspects of a laser-type gas analyzer can include a mid-infrared light reception signal processing and computing unit that calculates a gas concentration of the first gas to be measured on the basis of a mid-infrared light reception signal, a near-infrared light reception signal processing and computing unit that detects, at respective times, the gas concentration of the second gas to be measured, water concentration in a space, and alight amount decrement due to dust, on the basis of near-infrared light reception signal. Also included can be a gas concentration correcting unit that corrects the gas concentrations of the first and second gases to be measured using the water concentration and the light amount decrement.
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Citations
3 Claims
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1. A laser-type gas analyzer, comprising:
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a mid-infrared laser light-emitting unit that emits laser light of a wavelength band of a mid-infrared region that includes an optical absorption spectrum of a first gas to be measured; a mid-infrared laser driving unit that drives the mid-infrared laser light-emitting unit; a mid-infrared laser optical unit that collimates the laser light emitted by the mid-infrared laser light-emitting unit, and irradiates the light into a space to be measured in which the first gas to be measured is present; a mid-infrared light-receiving unit that receives the laser light irradiated by the mid-infrared laser optical unit, and outputs the received laser light as an electrical mid-infrared light reception signal; a mid-infrared light reception signal processing and computing unit that extracts, from the mid-infrared light reception signal, a signal component affected by optical absorption by the first gas to be measured, and calculates a gas concentration of the first gas to be measured on the basis of an amount of change of this signal component; a near-infrared laser light-emitting unit that emits, at respective times, first laser light of a wavelength band of a near-infrared region that includes an optical absorption spectrum of a second gas to be measured, second laser light of a wavelength band of a near-infrared region that includes an optical absorption spectrum of water, and third laser light of a wavelength band of a near-infrared region in which the optical absorption spectra of water, the first gas to be measured and the second gas to be measured are equal to or smaller than a predetermined amount; a near-infrared laser driving unit that drives the near-infrared laser light-emitting unit; a near-infrared laser optical unit that collimates, at respective times, the first, second and third laser light emitted by the near-infrared laser light-emitting unit, and irradiates the collimated light to the space to be measured; a near-infrared light-receiving unit that receives, at respective times, the first, second and third laser light irradiated by the near-infrared laser optical unit, and outputs the received light as respective electrical near-infrared light reception signals; a near-infrared light reception signal processing and computing unit that performs, at respective times, processes of extracting, from the near-infrared light reception signal of the first laser light, a signal component affected by optical absorption by the second gas to be measured, and computing a gas concentration of the second gas to be measured on the basis of an amount of change of this signal component, computing a water concentration in the space on the basis of the near-infrared light reception signal of the second laser light, and computing a light amount decrement due to dust on the basis of the near-infrared light reception signal of the third laser light; and a gas concentration correcting unit that corrects the gas concentration of the first gas to be measured, as worked out by the mid-infrared light reception signal processing and computing unit and the gas concentration of the second gas to be measured, as worked out by the near-infrared light reception signal processing and computing unit, in use of the water concentration and light amount decrement as worked out by the near-infrared light reception signal processing and computing unit. - View Dependent Claims (2, 3)
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Specification