Physical quantity sensor and electronic apparatus
First Claim
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1. A physical quantity sensor comprising:
- a substrate having first and second recesses in a principal surface;
a movable part supported on the substrate;
a movable electrode part provided in the movable part; and
a fixed electrode part provided on the principal surface of the substrate and located to be opposed to the movable electrode part,wherein the fixed electrode part is connected to fixed electrode wiring provided on a first bottom surface of the first recess in the substrate, an end of the fixed electrode wiring is located at a first side of the principal surface, the fixed electrode wiring extends toward a center of the substrate, and a first depth of the first recess is larger than a first thickness of the fixed electrode wiring,the movable electrode part is connected to movable electrode wiring provided on a second bottom surface of the second recess in the substrate, an end of the movable electrode wiring is located at the first side of the principal surface, the movable electrode wiring is located in a direction along an extended direction of the fixed electrode wiring at the first side of the principal surface, and a second depth of the second recess is larger than a second thickness of the movable electrode wiring, anda first shield part is provided on the principal surface of the substrate at least between the fixed electrode wiring and the movable electrode wiring at the first side, and the first shield part does not overlap with the fixed electrode wiring and the movable electrode wiring in a plan view, wherein the substrate has first and second end recesses at the first side of the principal surface, and the first and second end recesses are continuously provided with the first and second recesses, respectively, the end of the fixed electrode wiring is located at the first end recess, and the end of the movable electrode wiring is located at the second end recess, and a third depth of the first end recess is larger than the first depth of the first recess, and a fourth depth of the second end recess is larger than the second depth of the second recess.
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Abstract
A physical quantity sensor includes a base substrate, a movable part located on the base substrate and provided on a principal surface of the base substrate, a movable electrode part provided in the movable part, and a fixed electrode part provided on the principal surface of the base substrate and located to be opposed to a movable electrode finger, and the fixed electrode part is connected to fixed electrode wiring provided at the principal surface side of the base substrate, the movable electrode part is connected to movable electrode wiring provided at the principal surface side of the base substrate, and a shield part is provided between the fixed electrode wiring and the movable electrode wiring.
19 Citations
15 Claims
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1. A physical quantity sensor comprising:
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a substrate having first and second recesses in a principal surface; a movable part supported on the substrate; a movable electrode part provided in the movable part; and a fixed electrode part provided on the principal surface of the substrate and located to be opposed to the movable electrode part, wherein the fixed electrode part is connected to fixed electrode wiring provided on a first bottom surface of the first recess in the substrate, an end of the fixed electrode wiring is located at a first side of the principal surface, the fixed electrode wiring extends toward a center of the substrate, and a first depth of the first recess is larger than a first thickness of the fixed electrode wiring, the movable electrode part is connected to movable electrode wiring provided on a second bottom surface of the second recess in the substrate, an end of the movable electrode wiring is located at the first side of the principal surface, the movable electrode wiring is located in a direction along an extended direction of the fixed electrode wiring at the first side of the principal surface, and a second depth of the second recess is larger than a second thickness of the movable electrode wiring, and a first shield part is provided on the principal surface of the substrate at least between the fixed electrode wiring and the movable electrode wiring at the first side, and the first shield part does not overlap with the fixed electrode wiring and the movable electrode wiring in a plan view, wherein the substrate has first and second end recesses at the first side of the principal surface, and the first and second end recesses are continuously provided with the first and second recesses, respectively, the end of the fixed electrode wiring is located at the first end recess, and the end of the movable electrode wiring is located at the second end recess, and a third depth of the first end recess is larger than the first depth of the first recess, and a fourth depth of the second end recess is larger than the second depth of the second recess. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A physical quantity sensor comprising:
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a substrate having first through third recesses in a principal surface, the principal surface having a first side and a second side opposite to the first side; a movable part supported on the substrate; a movable electrode part provided in the movable part; and a fixed electrode part provided on the principal surface of the substrate and located to be opposed to the movable electrode part, wherein the fixed electrode part is connected to first and second fixed electrode wirings respectively provided on a first bottom surface of the first recess and a second bottom surface of the second recess in the substrate, ends of the first and second fixed electrode wirings are located at the first side of the principal surface, the first and second fixed electrode wirings extend toward the second side of the principal surface via a center of the substrate, a first depth of the first recess is larger than a first thickness of the first fixed electrode wiring, and a second depth of the second recess is larger than a second thickness of the second fixed electrode wiring, the movable electrode part is connected to movable electrode wiring provided on a third bottom surface of the third recess in the substrate, an end of the movable electrode wiring is located at the first side of the principal surface, the movable electrode wiring is located in a direction along an extended direction of the first and second fixed electrode wirings at the first side of the principal surface, a third depth of the third recess is larger than a third thickness of the movable electrode wiring, and a first shield part is provided on the principal surface of the substrate between the second fixed electrode wiring and the movable electrode wiring at the first side, the first shield part does not overlap with the fixed electrode wiring and the movable electrode wiring in a plan view, and the first and second fixed electrode wirings sandwich the first shield part in the second side of the principal surface, wherein the substrate has first and third end recesses at the first side of the principal surface, and the first and third end recesses are continuously provided with the first and third recesses, respectively, the end of the fixed electrode wiring is located at the first end recess, and the end of the movable electrode wiring is located at the third end recess, and a fourth depth of the first end recess is larger than the first depth of the first recess, and a fifth depth of the third end recess is larger than the third depth of the third recess. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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Specification
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Current AssigneeCrystal Leap Zrt
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Original AssigneeSeiko Epson Corporation (Seiko Group)
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InventorsYoda, Mitsuhiro
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Primary Examiner(s)WILLIAMS, HEZRON
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Assistant Examiner(s)Zhong, Xin
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Application NumberUS13/569,493Publication NumberTime in Patent Office1,343 DaysField of Search735/143.2, 735/141.6US Class Current1/1CPC Class CodesG01P 15/0802 DetailsG01P 15/125 by capacitive pick-upG01P 2015/0814 for translational movement ...
