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Single chip scanning lidar and method of producing the same

  • US 9,310,471 B2
  • Filed: 06/27/2014
  • Issued: 04/12/2016
  • Est. Priority Date: 06/27/2014
  • Status: Active Grant
First Claim
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1. A method of fabricating a chip-scale scanning lidar comprising:

  • forming a two dimensional (2D) scanning micromirror for a transmit beam on a substrate;

    forming a two dimensional (2D) scanning micromirror for a receive beam on the substrate;

    forming a laser diode on the substrate;

    forming a photodetector on the substrate;

    forming a first waveguide on the substrate connected on one end of the first waveguide to a first facet of the laser diode;

    forming a first grating outcoupler on the substrate connected to another end of the first waveguide;

    forming a second waveguide on the substrate connected on one end of the second waveguide to a second facet of the laser diode;

    forming a second grating outcoupler on the substrate connected to another end of the second waveguide;

    forming a first fixed micromirror and a second fixed micromirror in a first dielectric layer;

    forming a third fixed micromirror in a second dielectric layer;

    forming a focusing component in a third dielectric layer;

    bonding the first, second and third dielectric layers together to form a composite structure;

    aligning the composite structure to the substrate over the laser diode and photodetector; and

    bonding the composite structure to the substrate over the laser diode and photodetector.

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