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Apparatus and method for sub-micrometer elemental image analysis by mass spectrometry

  • US 9,312,111 B2
  • Filed: 03/30/2015
  • Issued: 04/12/2016
  • Est. Priority Date: 04/02/2014
  • Status: Active Grant
First Claim
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1. A mass spectrometer system for elemental analysis of a planar sample, the mass spectrometer system comprising:

  • a) a sample interface comprising a holder that is configured to hold a substrate comprising a planar sample;

    b) a primary ion source capable of irradiating a segment on the planar sample with a beam of primary ions that is less than 1 mm in diameter, wherein irradiation of the planar sample with the primary ions results in the production of secondary elemental atomic ions derived from staining elements associated with the planar sample;

    c) an orthogonal ion mass-to-charge ratio analyzer positioned downstream of sample interface, the analyzer being configured to separate secondary elemental atomic ions according to their mass-to-charge ratio by time of flight;

    d) a main ion detector for detecting the secondary elemental atomic ions and producing mass spectra measurements; and

    e) a synchronizer that associates the mass spectra measurements with positions on the planar sample,wherein the system is configured so that so that the beam of primary ions scans across the planar sample in two dimensions.

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