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Method of making a flexible circuit electrode array

  • US 9,314,615 B2
  • Filed: 03/16/2012
  • Issued: 04/19/2016
  • Est. Priority Date: 04/28/2005
  • Status: Active Grant
First Claim
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1. A method of making a flexible circuit electrode array comprising:

  • providing a substrate;

    depositing a polymer base layer on the substrate;

    depositing a first metal layer on said polymer base layer;

    patterning said first metal to form first metal traces, electrodes and bond pads;

    depositing a polymer interlayer on said polymer base layer and said first metal traces, electrodes and bond pads;

    patterning said polymer interlayer to provide vias;

    depositing a second metal layer on said polymer interlayer filling said vias;

    patterning said second metal layer to form second metal traces, electrodes and bond pads;

    depositing a polymer top layer on said polymer interlayer and said second metal traces, electrodes and bond pads;

    patterning said polymer top layer to provide openings for exposing the second electrodes and bond pads, thus forming a flexible circuit electrode array;

    removing said flexible circuit from the substrate; and

    embedding a portion of the flexible circuit electrode array including electrodes in an curved body having a generally convex curved surface in the plane of a retina, the curved body curved to conform to a spherical curvature of the retina.

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