Ductile mode drilling methods for brittle components of plasma processing apparatuses

• US 9,314,854 B2
• Filed: 01/30/2013
• Issued: 04/19/2016
• Est. Priority Date: 01/30/2013
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Huang, Lihua Li, Scott, Duane D., Doench, Joseph P., Burns, Jamie, Stenta, Emily P., Bettencourt, Gregory R., Daugherty, John E.
• Primary Examiner(s): Vinh, Lan
• Application Number:
  US13/754,068
• Publication Number:
  US 20140213061A1
• Time in Patent Office: 1,175 Days
• Field of Search: 216/17, 216/39, 216/52, 216/56, 216/94, 156/345.33, 156/345.34, 156/345.3, 438/710, 438/712, 438/714, 219/121.7, 219/121.71
• US Class Current: 1/1
• CPC Class Codes: B23B 35/00 Methods for boring or drilling, or for working essentially requiring the use of boring or drilling machines; Use of auxiliary equipment in connection with such methods
• CPC Class Codes: B28D 1/14 by boring or drilling rotary drilling machines B23B; tools for drilling machines B23B51/00; portabe percussive machines B25D; rotary drilling machines for mining or quarrying E21B3/00
• CPC Class Codes: B28D 5/021 by drilling
• CPC Class Codes: H01J 37/3255 Material
• CPC Class Codes: Y10T 29/4973 Replacing of defective part
• CPC Class Codes: Y10T 29/49826 Assembling or joining
• CPC Class Codes: Y10T 408/03 Processes
• CPC Class Codes: Y10T 408/04 Bit detachable

Abstract

A method of drilling holes comprises ductile mode drilling the holes in a component of a plasma processing apparatus with a cutting tool wherein the component is made of a nonmetallic hard and brittle material. The method comprises drilling each hole in the component by controlling a depth of cut while drilling such that a portion of the brittle material undergoes high pressure phase transformation and forms amorphous portions of the brittle material during chip formation. The amorphous portions of the brittle material are removed from each hole such that a wall of each hole formed in the component has an as drilled surface roughness (Ra) of about 0.2 to 0.8 μm.

Claims

1. A method of ductile mode drilling holes in a component of a plasma processing apparatus with a cutting tool wherein the component is made of a nonmetallic hard and brittle material comprising:

drilling each hole in the component by controlling a depth of cut while drilling such that a portion of the brittle material undergoes high pressure phase transformation and forms amorphous portions of the brittle material during chip formation; and

removing amorphous portions of the brittle material from each hole such that a wall of each hole formed in the component has an as drilled surface roughness (Ra) of about 0.2 to 0.8 μ

m;

wherein the component is a silicon or silicon carbide showerhead electrode.

2. The method of claim 1, wherein the hard and brittle material is silicon.

3. The method of claim 1, further comprising cleaning the component with the ductile mode drilled holes with an acidic solution.

4. The method of claim 1, wherein (a) each hole has a diameter of about 0.2 to 15 mm;

or (b) each hole has a diameter of about 0.2 to 0.7 mm.

5. The method of claim 1, wherein each hole has a depth of about 5 to 15 mm.

6. The method of claim 1, wherein the component is a showerhead electrode of a plasma etching chamber.

7. The method of claim 1, wherein the cutting tool is diamond drill.

8. The method of claim 1, wherein (a) subsurface damage of each hole extends less than about 20 μ

m into the wall of the hole;

(b) subsurface damage of each hole extends less than about 10 μ

m into the wall of the hole;

or (c) subsurface damage of each hole extends less than about 5 μ

m into the wall of the hole.

9. The method of claim 1, wherein the as drilled surface roughness of the wall of each hole is between about 0.4 to 0.6 μ

m.

10. The method of claim 1, wherein deionized water is supplied to the hole during ductile mode drilling.

11. A method of replacing a component of a plasma processing apparatus comprising:

removing a used showerhead electrode from the plasma processing apparatus when the used showerhead electrode is eroded; and

replacing the used with a showerhead electrode made by the method of claim 1.

12. A method of installing a showerhead electrode in a plasma etching chamber comprising installing the showerhead electrode made by the method of claim 1 in a plasma etching chamber.

13. A method of etching a semiconductor substrate in a plasma processing apparatus, comprising:

installing a showerhead electrode made according to the method of claim 1 in a plasma chamber of a plasma processing apparatus; and

plasma etching at least one semiconductor substrate in the plasma chamber.

14. The method of claim 1, further comprising subjecting the cutting tool to intermittent ultrasonic cleaning before drilling a new hole in the component while ductile mode drilling the component of a hard and brittle material.

15. The method of claim 14, wherein the cutting tool undergoes ultrasonic cleaning after drilling each hole.

16. The method of claim 14, wherein the cutting tool undergoes a comprehensive cleaning process after ductile mode drilling each component, the comprehensive cleaning process comprising removing the cutting tool, cleaning the cutting tool with a caustic soap, and replacing the cutting tool.

17. A method of ductile mode drilling holes in a component of a plasma processing apparatus with a cutting tool wherein the component is made of a nonmetallic hard and brittle material comprising:

drilling each hole in the component by controlling a depth of cut while drilling such that a portion of the brittle material undergoes high pressure phase transformation and forms amorphous portions of the brittle material during chip formation; and

removing amorphous portions of the brittle material from each hole such that a wall of each hole formed in the component has an as drilled surface roughness (Ra) of about 0.2 to 0.8 μ

m;

wherein the ductile mode drilling is performed with a drill speed of about 20,000 to 60,000 revolutions per minute, a feed rate at about 0.5 to 1.5 inches per minute, a peck depth of about 0.001 to 0.004 inch, and a depth of cut less than about 450 nanometers per revolution.

18. The method of claim 17, wherein the depth of cut is about 200 to 400 nanometers per revolution.

19. The method of claim 17, wherein the ductile mode drilling is performed with a drill speed of about 35,000 to 55,000 revolutions per minute.