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Profile measuring instrument, adjusting method for profile measuring instrument, and profile measuring method

  • US 9,316,476 B2
  • Filed: 10/16/2013
  • Issued: 04/19/2016
  • Est. Priority Date: 10/18/2012
  • Status: Active Grant
First Claim
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1. A profile measuring instrument usable to perform a rotary scanning measurement and a linear scanning measurement on a workpiece in a form of a revolution solid, comprising:

  • a turntable on which the workpiece is mounted, the turntable being rotatable around a predetermined rotation axis;

    a rotary scanning measurement unit being adapted to measure a displacement of a surface of the workpiece mounted on the turntable, the rotary scanning measurement unit comprising a first column, a first slider attached to the first column, a first arm attached to the first slider and a first probe supported by the first arm;

    a linear scanning measurement unit being adapted to measure a profile of the surface of the workpiece mounted on the turntable along a predetermined measurement axis, the linear scanning measurement unit comprising a second column, a second slider attached to the second column, a second arm attached to the second slider and a second probe supported by the second arm; and

    an aligning mechanism being adapted to relatively move the linear scanning measurement unit and the turntable in a direction intersecting with the measurement axis, whereinthe linear scanning measurement unit and the turntable are adjusted to relative positions at which the measurement axis passes through the rotation axis.

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