Span line pressure effect compensation for diaphragm pressure sensor
First Claim
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1. A differential pressure sensor for sensing a differential pressure of a process fluid, comprising:
- a sensor body having a sensor cavity formed therein having a cavity profile; and
a diaphragm in the sensor cavity configured to deflect in response to an applied differential pressure, the diaphragm having a diaphragm profile wherein a gap between the cavity profile and the diaphragm profile changes as a function of the differential pressure;
wherein at least one of the cavity profile and diaphragm profile changes as a function of a line pressure, wherein the at least one of the cavity profile and diaphragm profile changes to compensate for changes in the gap due to radial deformation of the sensor body due to the line pressure and thereby reduce errors in differential pressure measurements due to the line pressure.
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Abstract
A differential pressure sensor for sensing a differential pressure of a process fluid, includes a sensor body having a sensor cavity formed therein with a cavity profile. A diaphragm in the sensor cavity deflects in response to an applied differential pressure. The diaphragm has a diaphragm profile. A gap formed between the cavity profile and the diaphragm profile changes as a function of the differential pressure. At least one of the cavity profile and diaphragm profile changes as a function of a line pressure to compensate for changes in the gap due to deformation of the sensor body from the line pressure.
18 Citations
21 Claims
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1. A differential pressure sensor for sensing a differential pressure of a process fluid, comprising:
- a sensor body having a sensor cavity formed therein having a cavity profile; and
a diaphragm in the sensor cavity configured to deflect in response to an applied differential pressure, the diaphragm having a diaphragm profile wherein a gap between the cavity profile and the diaphragm profile changes as a function of the differential pressure;
wherein at least one of the cavity profile and diaphragm profile changes as a function of a line pressure, wherein the at least one of the cavity profile and diaphragm profile changes to compensate for changes in the gap due to radial deformation of the sensor body due to the line pressure and thereby reduce errors in differential pressure measurements due to the line pressure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
- a sensor body having a sensor cavity formed therein having a cavity profile; and
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19. A method of sensing a differential pressure of a process fluid, comprising:
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applying a first and second process pressure to a sensor body, the sensor body having a sensor cavity formed therein with a cavity profile; placing a diaphragm in the sensor cavity of the sensor body configured to deflect in response to a pressure difference between the first applied pressure and the second applied pressure, the diaphragm having a diaphragm profile which forms a gap between the cavity profile and the diaphragm profile and wherein deflection of the diaphragm causes the gap to change as a function of the pressure difference; compensating for differential pressure measurement inaccuracies due to a line pressure applied to the sensor body by changing at least one of the cavity profile and diaphragm profile as a function of the line pressure, and thereby reduce errors in differential pressure measurements due to the line pressure; and measuring differential pressure based upon deflection of the diaphragm within the sensor body. - View Dependent Claims (20, 21)
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Specification