Acceleration sensor having a capacitor array located in the center of an inertial mass
First Claim
1. An acceleration sensor comprising:
- a substrate;
an inertial mass that is spaced from the substrate and moveable along a detection direction which lies in an x-y plane, the inertial mass having a periphery and a center of gravity as viewed along the x-y plane; and
an electrostatic capacitor array located within the periphery of the inertial mass and surrounding the center of gravity of the inertial mass as viewed along the x-y plane, the electrostatic capacitor array including a plurality of capacitor elements each having a respective fixed electrode and a respective movable electrode, the movable electrodes moving along the detection direction in response to an acceleration of the inertial mass in the detection direction, the distance between each of the fixed electrodes on the one hand and its associated movable electrode on the other varying, and therefore the electrostatic capacity of the capacitor elements varying, according to the acceleration of the inertial mass in the detection direction.
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Accused Products
Abstract
An acceleration sensor achieving improvement of sensitivity and comprehensive miniaturization as a device includes a first sensor. The first sensor is furnished with an electrostatic capacitor that is configured such that a first fixed electrode, a second fixed electrode and a movable electrode are intensively arranged in a row. In the electrostatic capacitor, the first fixed electrode, the second fixed electrode and the movable electrode are arranged adjoining one another in acceleration detection direction (y-axis direction) at a position corresponding to the center of a weight in a plane view of a substrate. At one of longitudinal-side'"'"'s ends of each electrode (one of ends in x-axis direction), connectors are provided so as to connect the first fixed electrode and the second fixed electrode to the substrate by connectors.
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Citations
17 Claims
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1. An acceleration sensor comprising:
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a substrate; an inertial mass that is spaced from the substrate and moveable along a detection direction which lies in an x-y plane, the inertial mass having a periphery and a center of gravity as viewed along the x-y plane; and an electrostatic capacitor array located within the periphery of the inertial mass and surrounding the center of gravity of the inertial mass as viewed along the x-y plane, the electrostatic capacitor array including a plurality of capacitor elements each having a respective fixed electrode and a respective movable electrode, the movable electrodes moving along the detection direction in response to an acceleration of the inertial mass in the detection direction, the distance between each of the fixed electrodes on the one hand and its associated movable electrode on the other varying, and therefore the electrostatic capacity of the capacitor elements varying, according to the acceleration of the inertial mass in the detection direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification