Faceted, germanium slotted waveguide
First Claim
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1. A method for manufacturing a waveguide, comprising:
- providing a substrate;
depositing a protective layer onto the substrate;
removing a portion of the protective layer from the substrate to expose a plurality of areas on the surface of the substrate;
growing a first quality of germanium in a first area on the surface of the substrate to form a first sidewall having a uniform slope; and
growing a second quality of germanium in a second area on the surface of the substrate to form a second sidewall having a uniform slope, wherein the first sidewall, the second sidewall, and the top of the protective layer define the waveguide.
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Abstract
A waveguide having a substrate, a first germanium sidewall and a second germanium sidewall. The waveguide is formed by growing the first germanium sidewall and second germanium sidewall on the substrate.
43 Citations
9 Claims
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1. A method for manufacturing a waveguide, comprising:
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providing a substrate; depositing a protective layer onto the substrate; removing a portion of the protective layer from the substrate to expose a plurality of areas on the surface of the substrate; growing a first quality of germanium in a first area on the surface of the substrate to form a first sidewall having a uniform slope; and growing a second quality of germanium in a second area on the surface of the substrate to form a second sidewall having a uniform slope, wherein the first sidewall, the second sidewall, and the top of the protective layer define the waveguide. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification