Laser beam output control with optical shutter
First Claim
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1. A laser apparatus, comprising:
- a master oscillator configured to output a pulsed laser beam continually at a repetition rate;
a plurality of amplifiers disposed on a beam path of the pulsed laser beam;
a plurality of optical shutters disposed on the beam path of the pulsed laser beam; and
a controller configured to switch the plurality of optical shutters, whereineach of the plurality of optical shutters includes;
an electro-optic device;
a first optical filter disposed at an input side of the electro-optic device;
a second optical filter disposed at an output side of the electro-optic device; and
a power source coupled to the electro-optic device for applying voltage to the electro-optic device, and whereinthe controller is configured to switch the plurality of optical shutters based on a signal inputted from an external apparatus while the master oscillator oscillates the pulsed laser beam, to perform a burst operation to repeatedly alternate a period for which the pulsed laser beam is outputted at the repetition rate and a period for which the pulsed laser beam is not outputted, and to control the plurality of optical shutters to open sequentially from an upstream side optical shutter to a downstream side optical shutter.
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Abstract
A laser apparatus may include: a master oscillator configured to output a pulsed laser beam at a repetition rate; at least one amplifier disposed on a beam path of the pulsed laser beam; at least one optical shutter disposed on the beam path of the pulsed laser beam; and a controller configured to switch the at least one optical shutter.
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Citations
14 Claims
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1. A laser apparatus, comprising:
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a master oscillator configured to output a pulsed laser beam continually at a repetition rate; a plurality of amplifiers disposed on a beam path of the pulsed laser beam; a plurality of optical shutters disposed on the beam path of the pulsed laser beam; and a controller configured to switch the plurality of optical shutters, wherein each of the plurality of optical shutters includes; an electro-optic device; a first optical filter disposed at an input side of the electro-optic device; a second optical filter disposed at an output side of the electro-optic device; and a power source coupled to the electro-optic device for applying voltage to the electro-optic device, and wherein the controller is configured to switch the plurality of optical shutters based on a signal inputted from an external apparatus while the master oscillator oscillates the pulsed laser beam, to perform a burst operation to repeatedly alternate a period for which the pulsed laser beam is outputted at the repetition rate and a period for which the pulsed laser beam is not outputted, and to control the plurality of optical shutters to open sequentially from an upstream side optical shutter to a downstream side optical shutter. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification