Tuning a parameter associated with plasma impedance

• US 9,320,127 B2
• Filed: 03/30/2015
• Issued: 04/19/2016
• Est. Priority Date: 01/11/2013
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Valcore, John C. Jr., Lyndaker, Bradford J.
• Primary Examiner(s): VO, TUYET THI
• Application Number:
  US14/673,567
• Publication Number:
  US 20150206717A1
• Time in Patent Office: 386 Days
• Field of Search: 156/345.28, 156/345.44, 156/345.48, 156/345.49, 156/345.45, 156/345.46, 156/345.47, 156/345.43, 156/345.24, 156/345.1, 118/715, 118/722, 118/723.R, 118/723.I, 118/723.IR
• US Class Current: 1/1
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/32183 Matching circuits
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H01J 37/3299 Feedback systems
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence
• CPC Class Codes: H05H 1/466 using capacitive coupling means, e.g. electrodes
• CPC Class Codes: H05H 2242/26 Matching networks

Abstract

Systems and methods for tuning a parameter associated with plasma impedance are described. One of the methods includes receiving information to determine a variable. The information is measured at a transmission line and is measured when the parameter has a first value. The transmission line is used to provide power to a plasma chamber. The method further includes determining whether the variable is at a local minima and providing the first value to tune the impedance matching circuit upon determining that the variable is at the local minima. The method includes changing the first value to a second value of the parameter upon determining that the variable is not at the local minima and determining whether the variable is at a local minima when the parameter has the second value.

Claims

1. A method for tuning a parameter associated with plasma impedance, comprising:

receiving information to determine a variable, the information measured at a transmission line, the information measured when the parameter has a first value, the transmission line used to provide power to a plasma chamber via an impedance matching circuit;

determining whether the variable is at a local minima;

providing the first value to generate a radio frequency (RF) signal upon determining that the variable is at the local minima, the RF signal corresponding to the first value, the RF signal to be sent to the plasma chamber;

changing the first value to a second value of the parameter upon determining that the variable is not at the local minima; and

determining whether the variable is at a local minima when the parameter has the second value,

wherein the method is executed by a processor.

2. The method of claim 1, wherein said determining whether the variable is at a local minima when the parameter has a first value comprises:

determining whether the variable exceeds a threshold when the parameter has the first value;

or

determining whether the variable is stable when the parameter has the first value;

or

a combination thereof.

3. The method of claim 1, wherein the information includes voltage, current, power, or a combination thereof, wherein the variable includes gamma, reflected power, complex voltage reflection coefficient, plasma impedance, or a combination thereof.

4. A method for tuning a parameter associated with plasma impedance, comprising:

receiving information to determine a variable, the information measured at a transmission line, the information measured when the parameter has a first value, the transmission line used to provide power to a plasma chamber via an impedance matching circuit;

determining whether the variable is at a local minima when the parameter has the first value;

determining whether the first value of the parameter is within a limit of a learned value upon determining that the variable is at the local minima, the learned value determined during a learning routine;

providing the learned value to generate a radio frequency (RF) signal or to tune the impedance matching circuit upon determining that the first value of the parameter is within the limit; and

changing the first value to a second value of the parameter upon determining that the parameter has the first value that is outside the limit,

wherein the method is executed by a processor.

5. The method of claim 4, wherein said determining whether the variable is at a local minima when the parameter has a first value comprises:

determining whether the variable exceeds a threshold when the parameter has the first value; and

determining whether the variable is stable when the parameter has the first value.

6. The method of claim 5, wherein the variable is unstable when the variable oscillates between a minimum value and a maximum value, and a range between the minimum value and the maximum value exceeds a predetermined range.

7. The method of claim 6, wherein the variable is stable when the variable lacks oscillation.

8. The method of claim 5, wherein the method is executed during processing of a substrate.

9. The method of claim 8, wherein the substrate is implemented within an electronic device.

10. A method for tuning a parameter associated with plasma impedance, comprising:

receiving information to determine a variable, the information measured at a transmission line, the information measured when the parameter has a first value, the transmission line used to provide power to a plasma chamber via an impedance matching circuit;

determining a local minima of the variable, the local minima achieved when the parameter has the first value;

tuning the parameter by changing the first value to one or more other values of the parameter;

determining a number of events for which the variable is unstable when the parameter has the one or more other values;

determining whether the number of events exceeds a boundary;

reversing a direction of tuning the parameter upon determining that the number of events exceeds the boundary; and

discontinuing further tuning of the parameter upon determining that the number of events does not exceed the boundary,

wherein the method is executed by a processor.

11. The method of claim 10, wherein said determining the local minima of the variable comprises:

determining that the variable does not exceed a threshold when the parameter has the first value; and

determining that the variable is stable when the parameter has the first value.

12. The method of claim 10, wherein said reversing the direction of tuning the parameter includes increasing a value of the parameter or decreasing a value of the parameter.

13. The method of claim 10, wherein the method is executed during processing of a substrate, wherein the method is performed without knowledge of a learned value of the parameter, wherein the local minima is other than an absolute minima, wherein the processor is within a host system, the host system coupled to a radio frequency (RF) generator, the RF generator coupled to the plasma chamber via the impedance matching circuit.

14. The method of claim 10, wherein the method is executed during processing of a substrate, wherein the substrate is implemented within an electronic device.