Electronic device, electronic module, electronic apparatus, and moving object

• US 9,321,627 B2
• Filed: 03/17/2015
• Issued: 04/26/2016
• Est. Priority Date: 03/18/2014
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Furuhata, Makoto
• Primary Examiner(s): ARMAND, MARC ANTHONY
• Application Number:
  US14/660,058
• Publication Number:
  US 20150266720A1
• Time in Patent Office: 406 Days
• Field of Search: 257/415
• US Class Current: 1/1
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2201/0242 Gyroscopes
• CPC Class Codes: B81B 2201/025 Inertial sensors not provided for in B81B2201/0235 - B81B2201/0242
• CPC Class Codes: B81B 2207/092 Buried interconnects in the substrate or in the lid
• CPC Class Codes: B81B 2207/097 Interconnects arranged on the substrate or the lid, and covered by the package seal
• CPC Class Codes: B81B 7/0041 maintaining a controlled atmosphere with techniques not provided for in B81B7/0038
• CPC Class Codes: B81B 7/007 Interconnections between the MEMS and external electrical signals
• CPC Class Codes: B81B 7/02 containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] B81B7/04 takes precedence
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2924/00012 Relevant to the scope of the group, the symbol of which is combined with the symbol of this group
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/181 Encapsulation

Abstract

An electronic device includes an accommodation space formed between a first base material and a second base material, and a first functional element and a second functional element in the accommodation space. The accommodation space is disposed in an internal region of a bonding portion that bonds the first base material and the second base material together. The bonding portion includes a first bonding region provided on one side thereof and a second bonding region provided on the other side thereof. The electronic device includes a first wiring portion which is electrically connected to the first functional element and has a first direction toward the outside of the accommodation space through the first bonding region, and a second wiring portion which is electrically connected to the second functional element and has a second direction toward the outside of the accommodation space through the second bonding region.

Claims

1. An electronic device comprising:

a first base material;

a second base material, having an accommodation space formed between the first base material and the second base material, which is bonded to the first base material through a bonding portion; and

a first functional element and a second functional element which are accommodated in the accommodation space,

wherein the bonding portion includes a first bonding region and a second bonding region, and

wherein the first base material or the second base material is provided with a first wiring portion and a second wiring portion, the first wiring portion being electrically connected to the first functional element and having a first direction toward the outside of the accommodation space through the first bonding region and the second wiring portion being electrically connected to the second functional element and having a second direction toward the outside of the accommodation space through the second bonding region.

2. The electronic device according to claim 1,

wherein the first base material or the second base material includes a partition wall portion, and the accommodation space is divided into a first accommodation space and a second accommodation space by the partition wall portion,

wherein an extension direction of the partition wall portion is disposed along an extension direction of at least one of the first bonding region and the second bonding region,

wherein the first accommodation space accommodates the first functional element, and the second accommodation space accommodates the second functional element, and

wherein the first accommodation space and the second accommodation space have different internal environments.

3. The electronic device according to claim 2,

wherein the first accommodation space accommodates an angular velocity sensor element as the first functional element, and the second accommodation space accommodates an acceleration sensor element as the second functional element, and

wherein the internal environment of the first accommodation space has a decompressed atmosphere, and the internal environment of the second accommodation space has a barometric atmosphere.

4. The electronic device according to claim 3, wherein at least one of the angular velocity sensor element and the acceleration sensor element includes at least detection axes in two directions intersecting each other.

10. An electronic apparatus comprising the electronic device according to claim 1.

11. An electronic apparatus comprising the electronic device according to claim 2.

12. An electronic apparatus comprising the electronic device according to claim 3.

15. A moving object comprising the electronic device according to claim 1.

16. A moving object comprising the electronic device according to claim 2.

17. A moving object comprising the electronic device according to claim 3.

5. An electronic module comprising:

a first base material;

a second base material, having an accommodation space formed between the first base material and the second base material, which is bonded to the first base material through a bonding portion; and

a first functional element and a second functional element which are accommodated in the accommodation space,

wherein the bonding portion includes a first bonding region and a second bonding region, and

wherein the electronic module further comprises

an electronic device having a first wiring portion and a second wiring portion which are provided in the first base material or the second base material, the first wiring portion being electrically connected to the first functional element and having a first direction toward the outside of the accommodation space through the first bonding region and the second wiring portion being electrically connected to the second functional element and having a second direction toward the outside of the accommodation space through the second bonding region, and

a circuit element which is disposed so as to overlap at least a portion of the electronic device when seen in a plan view,

wherein the circuit element includes a first terminal portion electrically connected to the first wiring portion and a second terminal portion electrically connected to the second wiring portion, and

wherein the first terminal portion is disposed on the first bonding region side of the electronic device, and the second terminal portion is disposed on the second bonding region side of the electronic device.

6. The electronic module according to claim 5,

wherein the first base material or the second base material includes a partition wall portion, and the accommodation space is divided into a first accommodation space and a second accommodation space by the partition wall portion,

wherein an extension direction of the partition wall portion is disposed along an extension direction of at least one of the first bonding region and the second bonding region,

wherein the first accommodation space accommodates the first functional element, and the second accommodation space accommodates the second functional element, and

wherein the first accommodation space and the second accommodation space have different internal environments.

7. The electronic module according to claim 5,

wherein the first accommodation space accommodates an angular velocity sensor element as the first functional element,

wherein the second accommodation space accommodates an acceleration sensor element as the second functional element, and

wherein the internal environment of the first accommodation space has a decompressed atmosphere, and the internal environment of the second accommodation space has a barometric atmosphere.

8. The electronic module according to claim 7, wherein at least one of the angular velocity sensor element and the acceleration sensor element includes at least detection axes in two directions intersecting each other.

9. The electronic module according to claim 5,

wherein the first wiring portion and the first terminal portion are electrically connected to each other through a wire, and

wherein the second wiring portion and the second terminal portion are electrically connected to each other through a wire.

13. An electronic apparatus comprising the electronic module according to claim 5.

14. An electronic apparatus comprising the electronic module according to claim 6.

18. A moving object comprising the electronic module according to claim 5.

19. A moving object comprising the electronic module according to claim 6.