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Process for biosensor well formation

  • US 9,322,062 B2
  • Filed: 10/22/2014
  • Issued: 04/26/2016
  • Est. Priority Date: 10/23/2013
  • Status: Active Grant
First Claim
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1. A biochip, comprising:

  • a substrate; and

    a plurality of discrete sites formed on the substrate having a density of greater than five hundred wells per square millimeter, wherein each discrete site includes;

    sidewalls disposed on the substrate to form a well, wherein the well is formed by depositing on the substrate a material having reactive oxide groups and etching the well into the material, and wherein the sidewalls have a hard, planar top surface for a membrane to be formed atop, wherein the membrane spans across and seals the well; and

    an electrode disposed at the bottom of the well.

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