Process for biosensor well formation
First Claim
1. A biochip, comprising:
- a substrate; and
a plurality of discrete sites formed on the substrate having a density of greater than five hundred wells per square millimeter, wherein each discrete site includes;
sidewalls disposed on the substrate to form a well, wherein the well is formed by depositing on the substrate a material having reactive oxide groups and etching the well into the material, and wherein the sidewalls have a hard, planar top surface for a membrane to be formed atop, wherein the membrane spans across and seals the well; and
an electrode disposed at the bottom of the well.
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Accused Products
Abstract
A biochip for molecular detection and sensing is disclosed. The biochip includes a substrate. The biochip includes a plurality of discrete sites formed on the substrate having a density of greater than five hundred wells per square millimeter. Each discrete site includes sidewalls disposed on the substrate to form a well. Each discrete site includes an electrode disposed at the bottom of the well. In some embodiments, the wells are formed such that cross-talk between the wells is reduced. In some embodiments, the electrodes disposed at the bottom of the wells are organized into groups of electrodes, wherein each group of electrodes shares a common counter electrode. In some embodiments, the electrode disposed at the bottom of the well has a dedicated counter electrode. In some embodiments, surfaces of the sidewalls are silanized such that the surfaces facilitate the forming of a membrane in or adjacent to the well.
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Citations
11 Claims
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1. A biochip, comprising:
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a substrate; and a plurality of discrete sites formed on the substrate having a density of greater than five hundred wells per square millimeter, wherein each discrete site includes; sidewalls disposed on the substrate to form a well, wherein the well is formed by depositing on the substrate a material having reactive oxide groups and etching the well into the material, and wherein the sidewalls have a hard, planar top surface for a membrane to be formed atop, wherein the membrane spans across and seals the well; and an electrode disposed at the bottom of the well. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification