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Pressure sensor, acceleration sensor, and method for manufacturing pressure sensor

  • US 9,322,726 B2
  • Filed: 12/10/2014
  • Issued: 04/26/2016
  • Est. Priority Date: 01/20/2014
  • Status: Active Grant
First Claim
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1. A pressure sensor, comprising:

  • a base; and

    a sensor unit provided on the base,the sensor unit including;

    a transducing thin film having a first surface and being flexible;

    a first strain sensing element provided on the first surface; and

    a second strain sensing element provided on the first surface and separated from the first strain sensing element,the first strain sensing element including;

    a first magnetic layer having a first magnetization being changeable;

    a first film including oxygen at a first oxygen concentration;

    a second magnetic layer provided between the first magnetic layer and the first film, the second magnetic layer having a second magnetization being fixed; and

    a first intermediate layer provided between the first magnetic layer and the second magnetic layer,the second strain sensing element including;

    a third magnetic layer having a third magnetization being changeable;

    a second film having a second oxygen concentration different from the first oxygen concentration;

    a fourth magnetic layer provided between the third magnetic layer and the second film, the fourth magnetic layer having a fourth magnetization being fixed direction; and

    a second intermediate layer provided between the third magnetic layer and the fourth magnetic layer.

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