Pressure sensor, acceleration sensor, and method for manufacturing pressure sensor
First Claim
1. A pressure sensor, comprising:
- a base; and
a sensor unit provided on the base,the sensor unit including;
a transducing thin film having a first surface and being flexible;
a first strain sensing element provided on the first surface; and
a second strain sensing element provided on the first surface and separated from the first strain sensing element,the first strain sensing element including;
a first magnetic layer having a first magnetization being changeable;
a first film including oxygen at a first oxygen concentration;
a second magnetic layer provided between the first magnetic layer and the first film, the second magnetic layer having a second magnetization being fixed; and
a first intermediate layer provided between the first magnetic layer and the second magnetic layer,the second strain sensing element including;
a third magnetic layer having a third magnetization being changeable;
a second film having a second oxygen concentration different from the first oxygen concentration;
a fourth magnetic layer provided between the third magnetic layer and the second film, the fourth magnetic layer having a fourth magnetization being fixed direction; and
a second intermediate layer provided between the third magnetic layer and the fourth magnetic layer.
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Accused Products
Abstract
According to one embodiment, a pressure sensor includes a base and a sensor unit provided on the base. The sensor unit includes a transducing thin film having a first surface, a first strain sensing element provided on the first surface, and a second strain sensing element provided on the first surface. The first strain sensing element includes a first magnetic layer, a first film having a first oxygen concentration, a second magnetic layer provided between the first magnetic layer and the first film, and a first intermediate layer provided between the first and the second magnetic layer. The second strain sensing element includes a third magnetic layer, a second film having a second oxygen concentration different from the first concentration, a fourth magnetic layer provided between the third magnetic layer and the second film, and a second intermediate layer provided between the third and the fourth magnetic layer.
20 Citations
20 Claims
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1. A pressure sensor, comprising:
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a base; and a sensor unit provided on the base, the sensor unit including; a transducing thin film having a first surface and being flexible; a first strain sensing element provided on the first surface; and a second strain sensing element provided on the first surface and separated from the first strain sensing element, the first strain sensing element including; a first magnetic layer having a first magnetization being changeable; a first film including oxygen at a first oxygen concentration; a second magnetic layer provided between the first magnetic layer and the first film, the second magnetic layer having a second magnetization being fixed; and a first intermediate layer provided between the first magnetic layer and the second magnetic layer, the second strain sensing element including; a third magnetic layer having a third magnetization being changeable; a second film having a second oxygen concentration different from the first oxygen concentration; a fourth magnetic layer provided between the third magnetic layer and the second film, the fourth magnetic layer having a fourth magnetization being fixed direction; and a second intermediate layer provided between the third magnetic layer and the fourth magnetic layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An acceleration sensor, comprising:
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a base unit; a plummet; a connector connecting the plummet and the base unit, the connector being deformable according to a change of a position of the plummet relative to the base unit; a first strain sensing element provided on a first portion of the connector; and a second strain sensing element provided on a second portion of the connector, the second portion being separated from the first portion, the first strain sensing element including; a first magnetic layer having a first magnetization being changeable; a first film including oxygen at a first oxygen concentration; a second magnetic layer provided between the first magnetic layer and the first film, the second magnetic layer having a second magnetization being fixed; and a first intermediate layer provided between the first magnetic layer and the second magnetic layer, the second strain sensing element including; a third magnetic layer having a third magnetization being changeable; a second film having a second oxygen concentration different from the first oxygen concentration; a fourth magnetic layer provided between the third magnetic layer and the second film, the fourth magnetic layer having a fourth magnetization being fixed; and a second intermediate layer provided between the third magnetic layer and the fourth magnetic layer.
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14. A method for manufacturing a pressure sensor, the pressure sensor including a base and a sensor unit provided on the base, the sensor unit including a transducing thin film, a first strain sensing element, and a second strain sensing element, the transducing thin film having a first surface and being flexible, the first strain sensing element being provided on the first surface, the second strain sensing element being provided on the first surface and separated from the first strain sensing element, the first strain sensing element including a first magnetic layer, a first film, a second magnetic layer, and a first intermediate layer, the first magnetic layer having a first magnetization being changeable, the second magnetic layer being provided between the first magnetic layer and the first film and having a second magnetization being fixed, the first intermediate layer being provided between the first magnetic layer and the second magnetic layer, the second strain sensing element including a third magnetic layer, a second film, a fourth magnetic layer, and a second intermediate layer, the third magnetic layer having a third magnetization being changeable, the fourth magnetic layer being provided between the third magnetic layer and the second film and having a fourth magnetization being fixed, the second intermediate layer being provided between the third magnetic layer and the fourth magnetic layer, the method comprising:
forming a first oxide film used to form the first film. - View Dependent Claims (15, 16, 17, 18, 19, 20)
Specification