Method and system for forming a pattern on a reticle using charged particle beam lithography

• US 9,323,140 B2
• Filed: 02/11/2014
• Issued: 04/26/2016
• Est. Priority Date: 09/01/2008
• Status: Active Grant

• Current Assignee: D2S, Inc.
• Original Assignee: D2S, Inc.
• Inventors: Fujimura, Akira
• Primary Examiner(s): Young, Christopher
• Application Number:
  US14/177,679
• Publication Number:
  US 20140162466A1
• Time in Patent Office: 805 Days
• Field of Search: 430/5, 430/30, 430/296, 430/942, 716/53
• US Class Current: 1/1
• CPC Class Codes: G03F 1/20 Masks or mask blanks for imaging by charged particle beam [CPB] radiation, e.g. by electron beam; Preparation thereof
• CPC Class Codes: G03F 1/70 Adapting basic layout or design of masks to lithographic process requirements, e.g., second iteration correction of mask patterns for imaging
• CPC Class Codes: G06F 30/392 Floor-planning or layout, e.g. partitioning or placement
• CPC Class Codes: G06F 30/398 Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM] optical proximity correction [OPC] design processes G03F1/36
• CPC Class Codes: H01J 2237/31764 Dividing into sub-patterns
• CPC Class Codes: H01J 2237/31774 Multi-beam
• CPC Class Codes: H01J 2237/31776 Shaped beam
• CPC Class Codes: H01J 37/3026 Patterning strategy
• CPC Class Codes: H01J 37/3174 Particle-beam lithography, e.g. electron beam lithography
• CPC Class Codes: H01L 21/263 with high-energy radiation H01L21/261 takes precedence

Abstract

A method and system for fracturing or mask data preparation is disclosed in which a plurality of charged particle beam shots is determined which will produce a pattern on a reticle, where the reticle is to be used to form an aerial image on a resist-coated substrate using an optical lithographic process. A simulated reticle pattern is then calculated from the plurality of charged particle beam shots. A calculated aerial substrate image is then calculated using the simulated reticle pattern, and a shot in the plurality of shots is modified to improve the calculated aerial substrate image. Similar methods for forming a pattern on a reticle and for manufacturing an integrated circuit are also disclosed.

Claims

1. A method for fracturing or mask data preparation (MDP) for charged particle beam lithography, the method comprising:

determining a plurality of charged particle beam shots that will produce a pattern on a reticle, wherein the reticle is to be used to form an aerial image on a resist-coated substrate using an optical lithographic process;

calculating a simulated reticle pattern that will be produced on the reticle from the plurality of charged particle beam shots;

calculating a calculated aerial image which will be formed on the resist-coated substrate using the optical lithographic process with the simulated reticle pattern; and

modifying a shot in the plurality of charged particle beam shots to improve the calculated aerial image,

wherein the determining is performed using one or more computing hardware processors.

2. The method of claim 1 wherein the modifying improves a manufacturability characteristic of the calculated aerial image, wherein the manufacturability characteristic is selected from the group consisting of process variation (PV) band, depth of field, mask edge error factor (MEEF), critical dimension (CD) variation, edge placement error (EPE), and area variation.

3. The method of claim 1 wherein a shot in the plurality of charged particle beam shots comprises a multi-beam shot.

4. The method of claim 1 wherein the calculating of the simulated reticle pattern comprises charged particle beam simulation.

5. The method of claim 4 wherein the charged particle beam simulation includes at least one of a group consisting of forward scattering, backward scattering, resist diffusion, Coulomb effect, fogging, loading and resist charging.

6. The method of claim 1 wherein the calculating of the simulated reticle pattern comprises simulating at least one of the group consisting of resist bake, resist development and etch.

7. The method of claim 1 wherein the calculating of the calculated aerial image comprises lithography simulation.

8. The method of claim 1, further comprising calculating a substrate image from the calculated aerial image, wherein calculating the substrate image comprises simulating at least one of a group consisting of resist bake, resist development, and etch.

9. A method for forming a pattern on a reticle using charged particle beam lithography, the method comprising:

determining a plurality of charged particle beam shots that will form the pattern on the reticle, wherein the reticle is to be used to form an aerial image on a resist-coated substrate using an optical lithographic process;

calculating a simulated reticle pattern that will be produced on the reticle from the plurality of charged particle beam shots;

calculating a calculated aerial image which will be formed on the resist-coated substrate using the optical lithographic process with the simulated reticle pattern;

modifying a shot in the plurality of charged particle beam shots to improve the calculated aerial image; and

forming the pattern on the reticle with the plurality of charged particle beam shots, including the modified shot.

10. The method of claim 9 wherein the modifying improves a manufacturability characteristic of the calculated substrate image, wherein the manufacturability characteristic is selected from the group consisting of process variation (PV) band, depth of field, mask edge error factor (MEEF), critical dimension (CD) variation, edge placement error (EPE), and area variation.

11. The method of claim 9 wherein a shot in the plurality of charged particle beam shots comprises a multi-beam shot.

12. The method of claim 9 wherein the calculating of the simulated reticle pattern comprises charged particle beam simulation.

13. The method of claim 9 wherein the calculating of the calculated aerial image comprises lithography simulation.

14. The method of claim 9, further comprising calculating a substrate image from the calculated aerial image, wherein calculating the substrate image comprises simulating at least one of a group consisting of resist bake, resist development, and etch.

15. A method for manufacturing an integrated circuit comprising a resist-coated substrate, the method comprising:

determining a plurality of charged particle beam shots that will produce a pattern on a reticle, wherein the reticle is to be used to form an aerial image on the resist-coated substrate using an optical lithographic process;

calculating a simulated reticle pattern that will be produced on the reticle from the plurality of charged particle beam shots;

calculating a calculated aerial image which will be formed on the resist-coated substrate using the optical lithographic process with the simulated reticle pattern;

modifying a shot in the plurality of charged particle beam shots to improve the calculated aerial image; and

forming the pattern on the reticle with the plurality of charged particle beam shots, including the modified shot.

16. The method of claim 15 wherein the modifying improves a manufacturability characteristic of the calculated substrate image, wherein the manufacturability characteristic is selected from the group consisting of process variation (PV) band, depth of field, mask edge error factor (MEEF), critical dimension (CD) variation, edge placement error (EPE), and area variation.

17. The method of claim 15 wherein a shot in the plurality of charged particle beam shots comprises a multi-beam shot.

18. The method of claim 15 wherein the calculating of the simulated reticle pattern comprises charged particle beam simulation.

19. The method of claim 18 wherein the charged particle beam simulation includes at least one of a group consisting of forward scattering, backward scattering, resist diffusion, Coulomb effect, fogging, loading and resist charging.

20. The method of claim 15 wherein the calculating of the calculated aerial image comprises lithography simulation.

21. The method of claim 15, further comprising calculating a substrate image from the calculated aerial image, wherein calculating the substrate image comprises simulating at least one of a group consisting of resist bake, resist development, and etch.

22. A system for fracturing or mask data preparation (MDP) for charged particle beam lithography, the system comprising:

a means for determining a plurality of charged particle beam shots that produce a pattern on a reticle, wherein the reticle is to be used to form an aerial image on a resist-coated substrate using an optical lithographic process;

a means for calculating a simulated reticle pattern that will be produced on the reticle from the plurality of charged particle beam shots;

a means for calculating a calculated aerial image which will be formed on resist-coated substrate using the optical lithographic process with the simulated reticle pattern; and

a means for modifying a shot in the plurality of charged particle beam shots to improve the calculated aerial image.

23. The system of claim 22 wherein the means for modifying improves a manufacturability characteristic of the calculated substrate image, wherein the manufacturability characteristic is selected from the group consisting of process variation (PV) band, depth of field, mask edge error factor (MEEF), critical dimension (CD) variation, edge placement error (EPE), and area variation.

24. The system of claim 22 wherein the means for calculating the simulated reticle pattern performs charged particle beam simulation.

25. The system of claim 22 wherein the means for calculating the calculated aerial image performs lithography simulation.

26. The system of claim 22, further comprising a means for calculating the substrate image from the calculated aerial image, wherein the device configured to calculate the substrate image simulates at least one of a group consisting of resist bake, resist development, and etch.