Semiconductor device, power diode, and rectifier

• US 9,324,877 B2
• Filed: 09/11/2014
• Issued: 04/26/2016
• Est. Priority Date: 09/13/2010
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei, Godo, Hiromichi, Kobayashi, Satoshi
• Primary Examiner(s): Abdelaziez, Yasser A
• Application Number:
  US14/483,685
• Publication Number:
  US 20140374756A1
• Time in Patent Office: 593 Days
• Field of Search: None
• US Class Current: 1/1
• CPC Class Codes: H01L 29/24 including, apart from doping materials or other impurities, only semiconductor materials not provided for in groups H01L29/16, H01L29/18, H01L29/20, H01L29/22 including organic materials H10K99/00
• CPC Class Codes: H01L 29/42356 Disposition, e.g. buried gate electrode H01L29/42324 and H01L29/4234 take precedence
• CPC Class Codes: H01L 29/78648 arranged on opposing sides of the channel
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate

Abstract

An object is to provide a semiconductor device having electrical characteristics such as high withstand voltage, low reverse saturation current, and high on-state current. In particular, an object is to provide a power diode and a rectifier which include non-linear elements. An embodiment of the present invention is a semiconductor device including a first electrode, a gate insulating layer covering the first electrode, an oxide semiconductor layer in contact with the gate insulating layer and overlapping with the first electrode, a pair of second electrodes covering end portions of the oxide semiconductor layer, an insulating layer covering the pair of second electrodes and the oxide semiconductor layer, and a third electrode in contact with the insulating layer and between the pair of second electrodes. The pair of second electrodes are in contact with end surfaces of the oxide semiconductor layer.

Claims

1. A semiconductor device comprising a transistor, the transistor comprising:

a first gate electrode over a substrate;

a first gate insulating layer over the first gate electrode;

an oxide semiconductor layer over the first gate insulating layer;

a source electrode and a drain electrode over the oxide semiconductor layer;

a second gate insulating layer over the source electrode and the drain electrode;

a second gate electrode over the second gate insulating layer,

wherein the oxide semiconductor layer is located between the first gate electrode and the second gate electrode,

wherein the oxide semiconductor layer comprises a first side surface along a channel length direction, a second side surface opposed to the first side surface, a third side surface along a channel width direction, and a fourth side surface opposed to the third side surface,

wherein the source electrode is in contact with the first, second, and third side surfaces of the oxide semiconductor layer,

wherein the drain electrode is in contact with the first, second, and fourth side surfaces of the oxide semiconductor layer, and

wherein the second gate electrode extends beyond the oxide semiconductor layer along the channel width direction.

2. The semiconductor device according to claim 1, wherein the first gate electrode is electrically connected to one of the source electrode and the drain electrode.

3. The semiconductor device according to claim 1, wherein the oxide semiconductor layer is a crystalline oxide semiconductor layer.

4. The semiconductor device according to claim 1, wherein the oxide semiconductor layer comprises indium, gallium, and zinc.

5. The semiconductor device according to claim 1, wherein a thickness of the oxide semiconductor layer is greater than or equal to 0.1 μ

m and less than or equal to 50 μ

m.

6. The semiconductor device according to claim 1, wherein an off-state current per micrometer of a channel width of the transistor is 100 zA or less at room temperature.

7. The semiconductor device according to claim 1,

wherein a length of the oxide semiconductor layer is smaller than a length of the first gate electrode in the channel length direction, and

wherein a length of the oxide semiconductor layer is larger than a length of the second gate electrode in the channel length direction.

8. The semiconductor device according to claim 1,

wherein the second gate electrode comprises a first region and a second region opposed to the first region in the channel width direction,

wherein the first region of the second gate electrode is opposed to the first side surface of the oxide semiconductor layer with the second gate insulating layer interposed therebetween, and

wherein the second region of the second gate electrode is opposed to the second side surface of the oxide semiconductor layer with the second gate insulating layer interposed therebetween.

9. A semiconductor device comprising a transistor, the transistor comprising:

a first gate electrode over a substrate;

a first gate insulating layer over the first gate electrode;

an oxide semiconductor layer over the first gate insulating layer, the oxide semiconductor layer comprising a first layer and a second layer;

a source electrode and a drain electrode over the oxide semiconductor layer;

a second gate insulating layer over the source electrode and the drain electrode;

a second gate electrode over the second gate insulating layer,

wherein the oxide semiconductor layer is located between the first gate electrode and the second gate electrode,

wherein the oxide semiconductor layer comprises a first side surface along a channel length direction, a second side surface opposed to the first side surface, a third side surface along a channel width direction, and a fourth side surface opposed to the third side surface,

wherein the source electrode is in contact with the first, second, and third side surfaces of the oxide semiconductor layer,

wherein the drain electrode is in contact with the first, second, and fourth side surfaces of the oxide semiconductor layer, and

wherein the second gate electrode extends beyond the oxide semiconductor layer along the channel width direction.

10. The semiconductor device according to claim 9, wherein the first gate electrode is electrically connected to one of the source electrode and the drain electrode.

11. The semiconductor device according to claim 9,

wherein the first layer is a first crystalline oxide semiconductor layer, and

wherein the second layer is a second crystalline oxide semiconductor layer.

12. The semiconductor device according to claim 9, wherein the oxide semiconductor layer comprises indium, gallium, and zinc.

13. The semiconductor device according to claim 9, wherein a thickness of the oxide semiconductor layer is greater than or equal to 0.1 μ

m and less than or equal to 50 μ

m.

14. The semiconductor device according to claim 9, wherein an off-state current per micrometer of a channel width of the transistor is 100 zA or less at room temperature.

15. The semiconductor device according to claim 9,

wherein a length of the oxide semiconductor layer is smaller than a length of the first gate electrode in the channel length direction, and

wherein a length of the oxide semiconductor layer is larger than a length of the second gate electrode in the channel length direction.

16. The semiconductor device according to claim 9,

wherein the second gate electrode comprises a first region and a second region opposed to the first region in the channel width direction,

wherein the first region of the second gate electrode is opposed to the first side surface of the oxide semiconductor layer with the second gate insulating layer interposed therebetween, and

wherein the second region of the second gate electrode is opposed to the second side surface of the oxide semiconductor layer with the second gate insulating layer interposed therebetween.

17. A semiconductor device comprising a transistor, the transistor comprising:

a first gate electrode over a substrate;

a first gate insulating layer over the first gate electrode;

an oxide semiconductor layer over the first gate insulating layer;

a source electrode and a drain electrode over the oxide semiconductor layer;

a second gate insulating layer over the source electrode and the drain electrode;

a second gate electrode over the second gate insulating layer,

wherein the oxide semiconductor layer is located between the first gate electrode and the second gate electrode,

wherein the source electrode is in contact with a top surface and a first, second, and third side surfaces of the oxide semiconductor layer,

wherein the third side surface of the oxide semiconductor layer is located between the first and second side surfaces of the oxide semiconductor layer,

wherein a direction along the third side surface crosses a direction along the first side surface, and

wherein the second gate electrode extends beyond the oxide semiconductor layer along a channel width direction.

18. The semiconductor device according to claim 17, wherein the first gate electrode is electrically connected to one of the source electrode and the drain electrode.

19. The semiconductor device according to claim 17, wherein the oxide semiconductor layer is a crystalline oxide semiconductor layer.

20. The semiconductor device according to claim 17, wherein the oxide semiconductor layer comprises indium, gallium, and zinc.

21. The semiconductor device according to claim 17, wherein a thickness of the oxide semiconductor layer is greater than or equal to 0.1 μ

m and less than or equal to 50 μ

m.

22. The semiconductor device according to claim 17, wherein an off-state current per micrometer of a channel width of the transistor is 100 zA or less at room temperature.

23. The semiconductor device according to claim 17,

wherein a length of the oxide semiconductor layer is smaller than a length of the first gate electrode in a channel length direction, and

wherein a length of the oxide semiconductor layer is larger than a length of the second gate electrode in the channel length direction.

24. The semiconductor device according to claim 17,

wherein the second gate electrode comprises a first region and a second region opposed to the first region in the channel width direction,

wherein the first region of the second gate electrode is opposed to the first side surface of the oxide semiconductor layer with the second gate insulating layer interposed therebetween, and

wherein the second region of the second gate electrode is opposed to the second side surface of the oxide semiconductor layer with the second gate insulating layer interposed therebetween.