BioMEMS sensor and apparatuses and methods therefor
First Claim
1. A method of monitoring changes in a hardware implant device using a sensor device mounted to or integrated with the hardware device, which is implanted in a subject,wherein the sensor device comprises:
- a substrate; and
a resonator configured as a strain gauge composed essentially of;
a solid dielectric material disposed over the substrate as a dielectric capacitor;
a conductive layer between the substrate and the solid dielectric material and in contact with the substrate and the solid dielectric material; and
at least one conductive coil disposed on the solid dielectric material,wherein the substrate, the conductive layer, the solid dielectric material, and the conductive coil are configured to undergo strain as the hardware implant device mounted to or integral with the sensor device undergoes strain,wherein the substrate, the conductive layer, the solid dielectric material, and the conductive coil are configured as a biocompatible sensor device for implantation in a biological subject,wherein the resonator is configured to be inductively powered without an incorporated power supply,wherein the resonator is configured to reflect electromagnetic waves corresponding to a resonant frequency of the resonator in response to an alternating magnetic or electromagnetic field directed toward the sensor device, andwherein the resonant frequency of the resonator shifts in correspondence with strain applied to the resonator by the hardware implant device,wherein the method comprises the steps of;
inductively powering the resonator by directing an alternating magnetic or electromagnetic field toward the sensor device at different times over a period;
receiving electromagnetic waves reflected from the resonator, which undergoes strain as the hardware implant device undergoes strain, at different times over the period;
determining a shift in a resonant frequency of the resonator based on the received reflected electromagnetic waves at different times over the period; and
determining a temporal change in strain of the hardware implant device based on the determined shift in the resonant frequency of the resonator over the period.
2 Assignments
0 Petitions
Accused Products
Abstract
Electronic devices, apparatus, systems, and methods of operating and constructing the devices, apparatus, and/or systems include a wireless sensor configured to measure strain of hardware implanted in a subject. In various embodiments, temporal measurement of the hardware strain includes monitoring changes of the resonant frequency of the sensor. The sensor can be realized as an inductively powered device that operates as an all-on-chip resonator, where the components of the sensor are biocompatible. Additional apparatus, systems, and methods are disclosed.
50 Citations
41 Claims
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1. A method of monitoring changes in a hardware implant device using a sensor device mounted to or integrated with the hardware device, which is implanted in a subject,
wherein the sensor device comprises: -
a substrate; and a resonator configured as a strain gauge composed essentially of; a solid dielectric material disposed over the substrate as a dielectric capacitor; a conductive layer between the substrate and the solid dielectric material and in contact with the substrate and the solid dielectric material; and at least one conductive coil disposed on the solid dielectric material, wherein the substrate, the conductive layer, the solid dielectric material, and the conductive coil are configured to undergo strain as the hardware implant device mounted to or integral with the sensor device undergoes strain, wherein the substrate, the conductive layer, the solid dielectric material, and the conductive coil are configured as a biocompatible sensor device for implantation in a biological subject, wherein the resonator is configured to be inductively powered without an incorporated power supply, wherein the resonator is configured to reflect electromagnetic waves corresponding to a resonant frequency of the resonator in response to an alternating magnetic or electromagnetic field directed toward the sensor device, and wherein the resonant frequency of the resonator shifts in correspondence with strain applied to the resonator by the hardware implant device, wherein the method comprises the steps of; inductively powering the resonator by directing an alternating magnetic or electromagnetic field toward the sensor device at different times over a period; receiving electromagnetic waves reflected from the resonator, which undergoes strain as the hardware implant device undergoes strain, at different times over the period; determining a shift in a resonant frequency of the resonator based on the received reflected electromagnetic waves at different times over the period; and determining a temporal change in strain of the hardware implant device based on the determined shift in the resonant frequency of the resonator over the period. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A sensor device mountable to or integral with a hardware implant device, which is implantable in a subject, for monitoring strain applied to the hardware implant device, the sensor device comprising:
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a substrate; and a resonator configured as a strain gauge composed essentially of; a solid dielectric material disposed over the substrate as a dielectric capacitor; a conductive layer between the substrate and the solid dielectric material and in contact with the substrate and the solid dielectric material; and at least one conductive coil disposed on the solid dielectric material, wherein the substrate, the conductive layer, the solid dielectric material, and the conductive coil are configured to undergo strain as the hardware implant device mounted to or integral with the sensor device undergoes strain, wherein the substrate, the conductive layer, the solid dielectric material, and the conductive coil are configured as a biocompatible sensor device for implantation in a biological subject, wherein the resonator is configured to be inductively powered without an incorporated power supply, wherein the resonator is configured to reflect electromagnetic waves corresponding to a resonant frequency of the resonator in response to an alternating magnetic or electromagnetic field directed toward the sensor device, and wherein the resonant frequency of the resonator shifts in correspondence with strain applied to the resonator by the hardware implant device. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. An apparatus implantable in a biological subject, the apparatus comprising:
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a hardware implant device; and a sensor device attached to or integrated with the hardware implant device, wherein the sensor device includes; a substrate; and a resonator configured as a strain gauge composed essentially of; a solid dielectric material disposed over the substrate as a dielectric capacitor; a conductive layer between the substrate and the dielectric material and in contact with the substrate and the dielectric material; and at least one conductive coil disposed on the solid dielectric material, wherein the substrate, the conductive layer, the solid dielectric material, and the conductive coil are configured to undergo strain as the hardware implant device mounted to or integral with the sensor device undergoes strain, wherein the substrate, the conductive layer, the solid dielectric material, and the conductive coil are configured as a biocompatible sensor device for implantation in a biological subject, wherein the resonator is configured to be inductively powered without an incorporated power supply, wherein the resonator is configured to reflect electromagnetic waves corresponding to a resonant frequency of the resonator in response to an alternating or electromagnetic field directed toward the sensor device, and wherein the resonant frequency of the resonator shifts in correspondence with strain applied to the resonator by the hardware implant device. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32)
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33. A monitoring system comprising:
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an apparatus implantable in a biological subject, the apparatus including a hardware implant device and a sensor device mounted to or integral with the hardware implant device, wherein the sensor device comprises; a substrate; and a resonator configured as a strain gauge composed essentially of; a solid dielectric material disposed over the substrate as a dielectric capacitor; a conductive layer between the substrate and the solid dielectric material and in contact with the substrate and the solid dielectric material; and at least one conductive coil disposed on the solid dielectric material, wherein the substrate, the conductive layer, the solid dielectric material, and the conductive coil are configured to undergo strain as the hardware implant device mounted to or integral with the sensor device undergoes strain, wherein the substrate, the conductive layer, the solid dielectric material, and the conductive coil are configured as a biocompatible sensor device for implantation in a biological subject, and wherein the resonator is configured to be inductively powered without an incorporated power supply, wherein the resonator is configured to reflect electromagnetic waves corresponding to a resonant frequency of the resonator in response to an alternating magnetic or electromagnetic field directed toward the sensor device, and wherein the resonant frequency of the resonator shifts in correspondence with strain applied to the resonator by the hardware implant device; an electromagnetic field generator configured to generate an alternating magnetic or electromagnetic field to power the resonator; a receiver configured to receive electromagnetic waves reflected by the resonator in response to the resonator being excited by the generated alternating magnetic or electromagnetic field; a device configured to determine a shift in a resonant frequency of the resonator based on the electromagnetic waves reflected by the resonator at different times over a period; and an analyzer configured to determine a temporal change in strain of the hardware implant device based on the determined shift in the resonant frequency of the resonator over the period. - View Dependent Claims (34, 35, 36, 37, 38, 39)
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40. A method of manufacturing an implantable device implantable in a subject, the method comprising the steps of:
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fabricating a biocompatible sensor device that measures a change in strain the hardware implant device, and to be inductively powered without an integrated power supply; and disposing the biocompatible sensor device on the hardware implant device, wherein the fabricating step comprises the steps of; providing a substrate; and forming a resonator configured as a strain gauge by composed essentially of; a conductive layer over the substrate in contact therewith; a solid dielectric material on the conductive layer and in contact therewith as a dielectric capacitor; and at least one conductive coil on the solid dielectric material, wherein the substrate, the conductive layer, the solid dielectric material, and the conductive coil are configured to undergo strain as the hardware implant device mounted to or integral with the sensor device undergoes strain, wherein the substrate, the conductive layer, the solid dielectric material, and the conductive coil are configured as a biocompatible sensor device for implantation in a biological subject, wherein the resonator is configured to reflect electromagnetic waves corresponding to a resonant frequency of the resonator in response to electromagnetic waves directed toward the sensor device, and wherein the resonant frequency of the resonator shifts in correspondence with strain applied to the resonator by the hardware implant device. - View Dependent Claims (41)
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Specification