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BioMEMS sensor and apparatuses and methods therefor

  • US 9,326,728 B2
  • Filed: 02/25/2011
  • Issued: 05/03/2016
  • Est. Priority Date: 09/02/2008
  • Status: Expired due to Fees
First Claim
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1. A method of monitoring changes in a hardware implant device using a sensor device mounted to or integrated with the hardware device, which is implanted in a subject,wherein the sensor device comprises:

  • a substrate; and

    a resonator configured as a strain gauge composed essentially of;

    a solid dielectric material disposed over the substrate as a dielectric capacitor;

    a conductive layer between the substrate and the solid dielectric material and in contact with the substrate and the solid dielectric material; and

    at least one conductive coil disposed on the solid dielectric material,wherein the substrate, the conductive layer, the solid dielectric material, and the conductive coil are configured to undergo strain as the hardware implant device mounted to or integral with the sensor device undergoes strain,wherein the substrate, the conductive layer, the solid dielectric material, and the conductive coil are configured as a biocompatible sensor device for implantation in a biological subject,wherein the resonator is configured to be inductively powered without an incorporated power supply,wherein the resonator is configured to reflect electromagnetic waves corresponding to a resonant frequency of the resonator in response to an alternating magnetic or electromagnetic field directed toward the sensor device, andwherein the resonant frequency of the resonator shifts in correspondence with strain applied to the resonator by the hardware implant device,wherein the method comprises the steps of;

    inductively powering the resonator by directing an alternating magnetic or electromagnetic field toward the sensor device at different times over a period;

    receiving electromagnetic waves reflected from the resonator, which undergoes strain as the hardware implant device undergoes strain, at different times over the period;

    determining a shift in a resonant frequency of the resonator based on the received reflected electromagnetic waves at different times over the period; and

    determining a temporal change in strain of the hardware implant device based on the determined shift in the resonant frequency of the resonator over the period.

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