Transportation device having a monolithically integrated multi-sensor device on a semiconductor substrate and method therefor
First Claim
1. A transportation device configured to transport at least one person that is configured to couple to a wireless network comprisinga first integrated circuit comprising:
- a first sensor configured to measure a first parameter;
a second sensor configured to measure a second parameter; and
a third sensor configured to measure a third parameter wherein the first, second, and third parameters are different and wherein the first integrated circuit is coupled to the transportation device.
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Accused Products
Abstract
A transportation device is provided having multiple sensors configured to detect and measure different parameters of interest. The transportation device includes at least one monolithic integrated multi-sensor (MIMS) device. The MIMS device comprises at least two sensors of different types formed on a common semiconductor substrate. For example, the MIMS device can comprise an indirect sensor and a direct sensor. The transportation device couples a first parameter to be measured directly to the direct sensor. Conversely, the transportation device can couple a second parameter to be measured to the indirect sensor indirectly. Other sensors can be added to the transportation device by stacking a sensor to the MIMS device or to another substrate coupled to the MIMS device. This supports integrating multiple sensors such as a microphone, an accelerometer, and a temperature sensor to reduce cost, complexity, simplify assembly, while increasing performance.
65 Citations
37 Claims
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1. A transportation device configured to transport at least one person that is configured to couple to a wireless network comprising
a first integrated circuit comprising: -
a first sensor configured to measure a first parameter; a second sensor configured to measure a second parameter; and a third sensor configured to measure a third parameter wherein the first, second, and third parameters are different and wherein the first integrated circuit is coupled to the transportation device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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28. A transportation device configured to transport at least one person that is configured to couple to a wireless network comprising:
a first integrated circuit comprising; a first MEMs sensor wherein the first MEMs sensor is exposed to an external environment; and a second MEMs sensor; and a third sensor wherein the first, second, and third sensors each measure a different parameter and wherein the first integrated circuit is coupled to a transportation device. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35)
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36. A transportation device configured to transport at least one person that is configured to couple to a wireless network comprising:
a first integrated circuit comprising; a first MEMs sensor wherein the first MEMs sensor is exposed to an external environment; and a second MEMs sensor wherein the second MEMs sensor is sealed from the external environment, wherein the first and second MEMs sensors measure a different parameter, and wherein the first integrated circuit is coupled to the transportation device. - View Dependent Claims (37)
Specification