Vacuum isolation valve

• US 9,328,848 B2
• Filed: 12/26/2013
• Issued: 05/03/2016
• Est. Priority Date: 03/13/2013
• Status: Active Grant

• Current Assignee: MST Engineering Co., Ltd.
• Original Assignee: MST Engineering Co., Ltd.
• Inventors: Cho, Hanjung, Kim, Sangho
• Primary Examiner(s): Schneider, Craig
• Assistant Examiner(s): BARSS, KEVIN R
• Application Number:
  US14/140,655
• Publication Number:
  US 20140261756A1
• Time in Patent Office: 859 Days
• US Class Current: 1/1
• CPC Class Codes: F16K 3/18 by movement of the closure members
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations
• CPC Class Codes: H01J 2237/006 Details of gas supplies, e.g. in an ion source, to a beam line, to a specimen or to a workpiece, H01J37/3244 takes precedence; environmental cells for electron microscopes H01J2237/2003; microscopes with environmental specimen chamber H01J2237/2608
• CPC Class Codes: H01J 2237/022 Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
• CPC Class Codes: H01J 37/18 Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel vacuum locks for electron-beam tubes in general H01J29/865
• CPC Class Codes: H01J 37/32862 In situ cleaning of vessels and/or internal parts
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence
• CPC Class Codes: Y10T 137/4245 Cleaning or steam sterilizing

Abstract

The vacuum isolation valve includes a housing installed between a chamber and a chamber cleaning gas supply and including a tube connecting the chamber to the chamber cleaning gas supply, a tube isolator formed at a predetermined position of the tube, a first blocking unit installed to the housing, and a second blocking unit installed to the housing, for, when the first blocking unit moves in the first direction, maintaining communication between the chamber and the chamber cleaning gas supply by moving in a second direction and pressing the first blocking unit and for, when the first blocking unit moves in an opposite direction to the first direction, blocking communication between the chamber and the chamber cleaning gas supply.

Claims

1. A vacuum isolation valve, comprising:

a housing including a tube;

a hollow tube isolator connected to the tube at a predetermined position of the tube, for selectively isolating the tube;

a first blocking unit installed to the housing and configured to move in a first direction to a position above an opened first surface of the tube isolator; and

a second blocking unit installed to the housing and configured to move in a second direction, the second blocking unit arranged to press the first blocking unit to selectively block the first opened surface, when the first blocking unit moves in the first direction, and configured to move further in the second direction and pass through the first surface of the tube isolator, being inserted into the tube isolator, and block the tube, in close contact with a surface facing the first surface, when the first blocking unit moves in an opposite direction to the first direction.

2. The vacuum isolation valve according to claim 1, wherein the first direction is perpendicular to the second direction.

3. The vacuum isolation valve according to claim 1, wherein a first opening is formed on a second surface of the tube isolator facing the first surface of the tube isolator for passing a chamber cleaning gas, and a second opening is formed on a third surface of the tube isolator near to the second surface of the tube isolator for passing the chamber cleaning gas.

4. The vacuum isolation valve according to claim 3, wherein when the first blocking unit moves in the opposite direction to the first direction, the second blocking unit closes the first opening by moving in the second direction, being inserted into the tube isolator through the first surface, and closely contacting the second surface.

5. The vacuum isolation valve according to claim 3, wherein the housing further includes:

a first installation hole extended from the first surface; and

a second installation hole branched from the first installation hole,

wherein the first installation hole is perpendicular to the second installation hole.

6. The vacuum isolation valve according to claim 5, wherein the first blocking unit comprises:

a body fixed to the housing, extended from an end portion of the second installation hole;

a first mover installed in the body, movably in the first direction;

a joint member engaged with a portion of the first mover, movably in the first direction; and

a first blocker engaged with a portion of the joint member, for selectively blocking the first surface of the tube isolator by moving in the first direction.

7. The vacuum isolation valve according to claim 6, wherein the body is hollow to communicate with the second installation hole.

8. The vacuum isolation valve according to claim 6, wherein the first mover comprises:

a handle installed rotatably at a portion of the body;

a rotating shaft fixed to a center of the handle, inside the body; and

a vertical movement member accommodated in the body, which is engaged with the joint member at a first end of the vertical movement member and screw-engaged with the rotating shaft at a second end of the vertical movement member to be movable in the first direction.

9. The vacuum isolation valve according to claim 8, wherein the first blocking unit further comprises:

a first bellows connecting an inner surface of the body to one surface of the first blocker, for accommodating the vertical movement member and the joint member.

10. The vacuum isolation valve according to claim 6, wherein the first blocker has a ‘

T’

-shaped section.

11. The vacuum isolation valve according to claim 6, wherein a first sealing member is installed on a surface of the first blocker facing the first surface.

12. The vacuum isolation valve according to claim 11, wherein the first sealing member is an O-ring.

13. The vacuum isolation valve according to claim 5, wherein the second blocking unit comprises:

a cover fixed in the first installation hole and having an engagement hole formed at a center of the cover;

a second mover screw-engaged with the engagement hole to be movable in the second direction; and

a second blocker engaged with a portion of the second mover, for pressing the first blocking unit or selectively blocking the tube isolator by moving in the second direction.

14. The vacuum isolation valve according to claim 13, wherein an engagement member is formed at a portion of the second mover, a container is formed on a surface of the second blocker, for accommodating the engagement member, and the engagement member is rotatable in the container.

15. The vacuum isolation valve according to claim 13, wherein the second blocking unit further comprises:

a second bellows connecting one surface of the cover to one surface of the second blocker, for accommodating the second mover.

16. The vacuum isolation valve according to claim 13, wherein a second sealing member is installed on a surface of the second blocker closely contacting the second surface.

17. The vacuum isolation valve according to claim 16, wherein the second sealing member is an O-ring.