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DSA suspension having multi-layer PZT microactuator with active PZT constraining layers

  • US 9,330,698 B1
  • Filed: 03/28/2015
  • Issued: 05/03/2016
  • Est. Priority Date: 03/18/2013
  • Status: Active Grant
First Claim
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1. A dual stage actuated suspension for a hard disk drive, the suspension comprising:

  • a beam supporting a read/write head at a distal end thereof for writing data to, and reading data from, a data disk;

    a multi-layer piezoelectric microactuator assembly for effecting fine positional movements of the read/write head, the microactuator assembly comprising;

    a first piezoelectric layer and a second piezoelectric layer, the first layer being closest to a surface of the suspension to which the microactuator assembly is bonded;

    a first electrode on a bottom side of the first piezoelectric layer;

    a second electrode on a top side of the first piezoelectric layer and disposed underneath the second piezoelectric layer, there being no electrode between the first and second electrodes such that a distance between the first and second electrodes defines a thickness of the first piezoelectric layer, and such that a voltage applied across the first and second electrodes induces an electric field across the first piezoelectric layer thereby causing the first piezoelectric layer to expand or contract; and

    a third electrode on a top side of the second piezoelectric layer, there being no electrode between the second and third electrodes such that a distance between the second and third electrodes defines a thickness of the second piezoelectric layer, and such that a voltage applied across the second and third electrodes induces an electric field across the second piezoelectric layer thereby causing the second piezoelectric layer to expand or contract;

    wherein the second piezoelectric layer comprises the same material as the first piezoelectric layer and is thinner than the first piezoelectric layer; and

    wherein the first and second piezoelectric layers are poled such that when a microactuator activation voltage is applied to the microactuator assembly, the first and second piezoelectric layers tend to act in opposite directions.

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