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Plasma etching method and plasma etching apparatus

  • US 9,330,935 B2
  • Filed: 11/07/2013
  • Issued: 05/03/2016
  • Est. Priority Date: 11/09/2012
  • Status: Active Grant
First Claim
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1. A plasma etching method comprising:

  • providing a target object on a mounting table serving as a lower electrode, the target object being sequentially laminated with an organic film and a photoresist, the photoresist being one of an ArF resist and an Extreme Ultra-Violet (EUV) resist and having a predetermined pattern;

    applying plasma of HBr/Ar gas to a surface of the photoresist while introducing the HBr/Ar gas into a processing chamber and applying a first high frequency power and a negative DC voltage a shower head serving as to an upper electrode containing silicon disposed to face the target object without applying a second high frequency power having a frequency lower than that of the first high frequency power to the lower electrode in order to perform at least one of;

    (i) smoothing the surface of the photoresist by allowing the surface of the photoresist to absorb both hydrogen radicals and light energy from the plasma of HBr/Ar gas,(ii) hardening the surface of the photoresist by irradiating electrons from the upper electrode supplied with the negative DC voltage to the surface of the photoresist, and(iii) depositing SiBr-containing material on the surface of the photoresist from the plasma of HBr/Ar gas and the upper electrode supplied with the negative DC voltage, thereby reinforcing resistance of the photoresist to the plasma and improving a surface roughness of the photoresist; and

    using the photoresist where the resistance to the plasma is reinforced and the surface roughness is improved at the applying, etching the organic film by plasma of a processing gas which contains a CF-based gas and a CHF-based gas.

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