Helium management control system

• US 9,334,859 B2
• Filed: 10/24/2014
• Issued: 05/10/2016
• Est. Priority Date: 07/20/2001
• Status: Expired due to Term

• Current Assignee: Edwards Vacuum, LLC (Atlas Copco AB)
• Original Assignee: Brooks Automation Incorporated (Azenta, Inc.)
• Inventors: Dresens, Paul E., Ash, Gary S., Bartlett, Allen J., Andeen, Bruce R., Than, Y. Roberto, Chopy, Joseph Jr.
• Primary Examiner(s): Ali, Mohammad M
• Application Number:
  US14/523,507
• Publication Number:
  US 20150040596A1
• Time in Patent Office: 564 Days
• Field of Search: 62/555, 621/75, 165/11.1
• US Class Current: 1/1
• CPC Class Codes: B01D 8/00 Cold traps; Cold baffles pumps for evacuating by condensing or freezing F04B37/08
• CPC Class Codes: F04B 37/08 by condensing or freezing, e.g. cryogenic pumps
• CPC Class Codes: F17D 1/04 for distribution of gas
• CPC Class Codes: F17D 3/01 for controlling, signalling, or supervising the conveyance of a product
• CPC Class Codes: F17D 3/18 for measuring the quantity of conveyed product measuring volume or volume flow, in general G01F
• CPC Class Codes: F24F 11/30 for purposes related to the operation of the system, e.g. for safety or monitoring
• CPC Class Codes: F24F 2110/50 Air quality properties
• CPC Class Codes: F25B 2309/001 with a linear configuration or a linear motor
• CPC Class Codes: F25B 2309/002 with parallel working cold producing expansion devices in one circuit
• CPC Class Codes: F25B 2309/1428 Control of a Stirling refrigeration machine
• CPC Class Codes: F25B 2345/001 Charging refrigerant to a cycle
• CPC Class Codes: F25B 2345/003 Control issues for charging or collecting refrigerant to or from a cycle
• CPC Class Codes: F25B 45/00 Arrangements for charging or discharging refrigerant
• CPC Class Codes: F25B 9/002 characterised by the refrigerant
• CPC Class Codes: F25B 9/14 characterised by the cycle used, e.g. Stirling cycle
• CPC Class Codes: F25J 1/0007 Helium

Abstract

A helium management control system for controlling the helium refrigerant supply from a common manifold supplies cryogenic refrigerators with an appropriate helium supply. The system employs sensors to monitor and regulate the overall refrigerant supply. An appropriate supply of helium is distributed to each cryopump. If the total refrigeration supply exceeds the demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. If the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.

Claims

1. A system of controlling supply of refrigerant to a plurality of refrigerators, the system comprising:

a compressor bank having at least one compressor configured to supply a refrigerant, the at least one compressor including a high pressure supply line and a low pressure exhaust line;

a plurality of refrigerators, coupled to the compressor bank, configured to consume refrigerant; and

an electronic controller configured to regulate refrigerant supply to the at least one refrigerator in response to a differential pressure (DP) between the high pressure supply line and the low pressure exhaust line.

2. The system as in claim 1 wherein the electronic controller compares a differential pressure (DP) between the high pressure supply line and the low pressure exhaust line with a differential pressure (DP) setpoint.

3. The system as in claim 1 wherein the electronic controller is configured to regulate the refrigerant supply to the at least one refrigerator by causing the refrigerant supply to the at least one refrigerator to be reduced if the differential pressure (DP) exceeds a differential pressure (DP) setpoint.

4. The system as in claim 1 wherein the electronic controller is configured to regulate the refrigerant supply to the at least one refrigerator by causing the refrigerant supply to the at least one refrigerator to be increased if the differential pressure (DP) is below a differential pressure (DP) setpoint.

5. The system as in claim 1 wherein the electronic controller is further configured to reduce refrigerant supply to the at least one refrigerator if there is no demand for excess refrigerant.

6. The system as in claim 1 wherein the electronic controller is further configured to:

compute an available quantity of the refrigerant; and

regulate consumption of the refrigerant based, at least in part, on the computed available quantity of the refrigerant and the differential pressure (DP).

7. The system as in claim 1 wherein the electronic controller is further configured to determine if current values of at least one of supply pressure at the high pressure supply line and return pressure at the low pressure exhaust line are valid.

8. The system as in claim 1 wherein the electronic controller is configured to compare the differential pressure (DP) to a differential pressure (DP) setpoint;

and

the electronic controller is further configured to respond to the comparison by correcting the refrigerant consumption.

9. The system as in claim 1 wherein the electronic controller executes a compressor check routine to determine if an over pressure condition exists in which the differential pressure (DP) exceeds a differential pressure (DP) setpoint;

and

the electronic controller is further configured to respond to the over pressure condition by reducing the supply of refrigerant.

10. The system as in claim 9 wherein the compressor check routine prevents damaging operation to the at least one compressor from running without a sufficient supply of refrigerant.

11. The system as in claim 1 wherein the electronic controller is further configured to control compressor displacement in response to the differential pressure (DP).

12. The system as in claim 1 wherein the electronic controller is further configured to control speed of the compressor in response to the differential pressure (DP).

13. The system as in claim 1 wherein the electronic controller is further configured to control the speed of at least one displacer drive motor of at least one of the plurality of refrigerators in response to the differential pressure (DP).

14. The system as in claim 13 wherein the electronic controller is further configured to direct the displacer drive motor to increase speed if the differential pressure (DP) is greater than a differential pressure (DP) setpoint.

15. The system as in claim 14 wherein the differential pressure (DP) setpoint is 205 psi.

16. The system as in claim 13 wherein the electronic controller is further configured to control the speed of the at least one displacer drive motor in response to a differential pressure (DP) by directing the displacer drive motor to decrease speed if the differential pressure (DP) drops below a differential pressure (DP) setpoint.

17. The system as in claim 16 wherein the differential pressure (DP) setpoint is 190 psi.

18. The system as in claim 13 wherein the at least one displacer drive motor facilitates regulating the quantity of refrigerant used by the at least one refrigerator.

19. The system of claim 1 wherein the refrigerant is helium.

20. The system of claim 1 wherein the at least one refrigerator is included in a cryopump.

21. The system as in claim 1 wherein the electronic controller is a cryopump slave controller.

22. The system as in claim 1 wherein the electronic controller is a vacuum network controller.

23. The system as in claim 1 wherein the at least one refrigerator is a cryogenic refrigerator.

24. The system as in claim 1 wherein the at least one refrigerator utilizes a Gifford-McMahon process.

25. The system as in claim 1 further comprising at least one sensor configured to sense a supply pressure from the high pressure supply line and a return pressure from the low pressure exhaust line;

wherein the electronic controller is configured to determine the differential pressure (DP) from the supply pressure and the return pressure.

26. A method of controlling supply of refrigerant to a plurality of refrigerators comprising:

monitoring a compressor bank including at least one compressor, the at least one compressor including a high pressure supply line and a low pressure exhaust line, the compressor bank capable of supplying a refrigerant to at least one refrigerator;

determining a differential pressure (DP) between the high pressure supply line and the low pressure exhaust line; and

regulating the supply of refrigerant to at least one of the refrigerators in response to the differential pressure (DP) between the high pressure supply line and the low pressure exhaust line.

27. An electronic controller configured to control supply of refrigerant to at least one refrigerator, the controller including a non-transitory computer-readable medium having computer readable instructions embodied thereon and configured to:

monitor a compressor bank including at least one compressor, the compressor including a high pressure supply line and a low pressure exhaust line, the compressor bank capable of supplying a refrigerant to at least one refrigerator;

determine a differential pressure (DP) between the high pressure supply line and the low pressure exhaust line; and

regulate the supply of refrigerant to the at least one of the refrigerator in response to the differential pressure (DP) between the high pressure supply line and the low pressure exhaust line.

28. A refrigeration system comprising:

at least one compressor configured to supply a refrigerant to at least one refrigerator, the compressor including a high pressure supply line and a low pressure exhaust line;

the at least one refrigerator configured to consume at least a portion of the refrigerant; and

an electronic controller configured to correct refrigerant consumption at the at least one refrigerator in response to a differential pressure (DP) between the high pressure supply line and the low pressure exhaust line.