Please download the dossier by clicking on the dossier button x
×

Gap distributed Bragg reflectors

  • US 9,335,262 B2
  • Filed: 08/25/2011
  • Issued: 05/10/2016
  • Est. Priority Date: 08/25/2011
  • Status: Active Grant
First Claim
Patent Images

1. A method of making a device, comprising:

  • epitaxially growing a layer stack including one or more reflective layers and one or more interstitial layers, each interstitial layer disposed between two reflective layers; and

    forming vias that intersect at least some of the one or more reflective layers and the one or more interstitial layers;

    exposing the interstitial layers to an etchant through the vias;

    etching the interstitial layers;

    detecting a color of the surface of the device, a reflectivity of the device, or both a color of the surface of the device and a reflectivity of the device; and

    controlling the etching based on the detected color, the detected reflectivity, or both the detected color and the detected reflectivity.

View all claims
  • 7 Assignments
Timeline View
Assignment View
    ×
    ×