MEMS parameter identification using modulated waveforms
First Claim
1. A microelectromechanical systems (MEMS) system comprising:
- a MEMS sensor having a moveable mechanical element configured to be moveable responsive to an electromagnetic signal applied to the moveable mechanical element, and further comprising a sense contact configured to provide as an output an electromagnetic output signal corresponding to motion of the moveable mechanical element;
a control circuit in electrical communication with the moveable mechanical element of the MEMS sensor, and configured to provide an electromagnetic input signal comprising at least two oscillating frequencies to the moveable mechanical element of the MEMS sensor; and
demodulation circuitry in electrical communication with the sense contact of the MEMS sensor and the control circuit, and configured to demodulate the electromagnetic output signal corresponding to motion of the moveable mechanical element and provide a demodulated signal to the control circuit, wherein the control circuit is configured to evaluate the demodulated signal to determine at least one characteristic of the MEMS sensor.
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Accused Products
Abstract
A sensor system includes a microelectromechanical systems (MEMS) sensor, control circuit, signal evaluation circuitry, a digital to analog converter, signal filters, an amplifier, demodulation circuitry and memory. The system is configured to generate high and low-frequency signals, combine them, and provide the combined input signal to a MEMS sensor. The MEMS sensor is configured to provide a modulated output signal that is a function of the combined signal. The system is configured to demodulate and filter the modulated output signal, compare the demodulated, filtered signal with the input signal to determine amplitude and phase differences, and determine, based on the amplitude and phase differences, various parameters of the MEMS sensor. A method for determining MEMS sensor parameters is also provided.
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Citations
20 Claims
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1. A microelectromechanical systems (MEMS) system comprising:
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a MEMS sensor having a moveable mechanical element configured to be moveable responsive to an electromagnetic signal applied to the moveable mechanical element, and further comprising a sense contact configured to provide as an output an electromagnetic output signal corresponding to motion of the moveable mechanical element; a control circuit in electrical communication with the moveable mechanical element of the MEMS sensor, and configured to provide an electromagnetic input signal comprising at least two oscillating frequencies to the moveable mechanical element of the MEMS sensor; and demodulation circuitry in electrical communication with the sense contact of the MEMS sensor and the control circuit, and configured to demodulate the electromagnetic output signal corresponding to motion of the moveable mechanical element and provide a demodulated signal to the control circuit, wherein the control circuit is configured to evaluate the demodulated signal to determine at least one characteristic of the MEMS sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification