Method of manufacturing an optical device having a stepwise or tapered light input/output part
First Claim
1. A method of manufacturing an optical device comprising an optical waveguide including a core, a cladding provided around the core, and a light input/output part through which a light beam is input or output, said method comprising:
- preparing a substrate having a principal surface on which a substantially uniform thickness of single-crystalline film is formed, the film having constituent atoms substantially forming a diamond lattice structure and having a surface being of neither a (111) plane nor an equivalent plane to the (111) plane; and
subjecting the single-crystalline film to etching showing anisotropy depending on plane orientation to form the film into a terraced or tapered pattern in both a width direction and a thickness direction so as to expose the (111) plane and the equivalent plane.
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Accused Products
Abstract
In a method of manufacturing an optical device including an optical waveguide having a core, a cladding and a light input/output part through which a light beam is input or output, a substrate is prepared which is provided with a uniform thickness of single-crystalline film having its constituent atoms forming a diamond lattice structure and its surface being neither the (111) plane nor its equivalent planes. In the single-crystalline film, a precursor structure is formed which has a precursor of light input/output part. A mask is formed such as to expose the precursor with the remaining part covered. The structure is immersed into an alkaline solution for wet etching with the (111) planes used as etch-stop planes.
29 Citations
16 Claims
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1. A method of manufacturing an optical device comprising an optical waveguide including a core, a cladding provided around the core, and a light input/output part through which a light beam is input or output, said method comprising:
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preparing a substrate having a principal surface on which a substantially uniform thickness of single-crystalline film is formed, the film having constituent atoms substantially forming a diamond lattice structure and having a surface being of neither a (111) plane nor an equivalent plane to the (111) plane; and subjecting the single-crystalline film to etching showing anisotropy depending on plane orientation to form the film into a terraced or tapered pattern in both a width direction and a thickness direction so as to expose the (111) plane and the equivalent plane.
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2. A method of manufacturing an optical device comprising an optical waveguide including a core, a cladding provided around the core, and a light input/output part through which a light beam is input or output, said method comprising:
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preparing a substrate having a principal surface on which a substantially uniform thickness of single-crystalline film is formed, the film having constituent atoms substantially forming a diamond lattice structure and having a surface being neither a (111) plane nor an equivalent plane to the (111) plane; subjecting the single-crystalline film to etching showing anisotropy depending on plane orientation while increasing gradually a length of the single-crystalline film which is to be exposed from the etching mask so as to form the film into a terraced shape in both a width direction and a thickness direction; applying to the terraced shape a photoresist for covering a section where width thereof is substantially constant and a tapered section where width thereof changes gradually; conducting etching with the photoresist used as an etching mask to pattern the single-crystalline film; and removing the photoresist, followed by forming a cladding for covering the single-crystalline film, the terraced shape being formed by a riser having a face on which the (111) plane or the equivalent plane is exposed. - View Dependent Claims (3, 4, 5, 6, 7)
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8. A method of manufacturing an optical device comprising an optical waveguide including a core, a first cladding provided around the core, and a light input/output part through which a light beam is input or output, said method comprising:
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a first step of preparing a substrate having a principal surface on which a substantially uniform thickness of single-crystalline film is formed, the film having constituent atoms substantially forming a diamond lattice structure and having a surface being neither a (111) plane nor an equivalent plane to the (111) plane; a second step of patterning the single-crystalline film to form a substantially uniform thickness of precursor structure having a precursor of light input/output part; a third step of fabricating a structure having a mask formed thereon, the mask exposing the precursor of light input/output part and covering remaining part of the precursor structure; a fourth step of subjecting the precursor to etching showing anisotropy depending on plane orientation with the (111) plane and the equivalent plane used as etch-stop planes to thereby form the core in the precursor of the light input/output part; a fifth step of removing the mask; and a sixth step of covering the core with the first cladding to obtain the optical device. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16)
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Specification