Electrostatically steerable actuator
First Claim
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1. An electrostatically steerable actuator, the actuator comprising:
- a gimbaled platform, a central portion of a rear side of the platform extending outward from the platform, a diameter of the central portion being substantially smaller than a corresponding diameter of the platform, the platform including ridges that extend from the rear side of the platform; and
an electrode unit, the electrode unit comprising;
an array of electrodes facing the rear side of the platform to provide an adjustable electrostatic field to apply an electrostatic force on at least the central portion of the platform for tilting the platform; and
electrically isolated pads, wherein each one of the electrically isolated pads is located within a respective one of the electrodes and is positioned to be contacted by a respective one of the ridges when the platform is tilted so as to limit tilting of the platform.
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Abstract
An electrostatically steerable actuator includes a gimbaled platform. A central portion of a rear side of the platform extends outward from the platform. A diameter of the central portion is substantially smaller than a corresponding diameter of the platform. An array of electrodes faces the rear side of the platform to provide an adjustable electrostatic field for tilting the platform.
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Citations
14 Claims
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1. An electrostatically steerable actuator, the actuator comprising:
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a gimbaled platform, a central portion of a rear side of the platform extending outward from the platform, a diameter of the central portion being substantially smaller than a corresponding diameter of the platform, the platform including ridges that extend from the rear side of the platform; and an electrode unit, the electrode unit comprising; an array of electrodes facing the rear side of the platform to provide an adjustable electrostatic field to apply an electrostatic force on at least the central portion of the platform for tilting the platform; and electrically isolated pads, wherein each one of the electrically isolated pads is located within a respective one of the electrodes and is positioned to be contacted by a respective one of the ridges when the platform is tilted so as to limit tilting of the platform. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification