Electrostatically steerable actuator

• US 9,335,544 B2
• Filed: 03/15/2013
• Issued: 05/10/2016
• Est. Priority Date: 03/15/2013
• Status: Active Grant

• Current Assignee: RiT Wireless Ltd.
• Original Assignee: RiT Wireless Ltd.
• Inventors: Kin, David, Shar, Alex, Medina, Moshe
• Primary Examiner(s): Won, Bumsuk
• Assistant Examiner(s): Beatty, Collin X
• Application Number:
  US13/838,515
• Publication Number:
  US 20140268268A1
• Time in Patent Office: 1,152 Days
• Field of Search: 359/200.6, 359/200.7, 359/200.8, 359/199.2
• US Class Current: 1/1
• CPC Class Codes: G02B 26/105 with one or more pivoting mirrors or galvano-mirrors G02B26/101 takes precedence
• CPC Class Codes: G02B 6/3564 Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C

Abstract

An electrostatically steerable actuator includes a gimbaled platform. A central portion of a rear side of the platform extends outward from the platform. A diameter of the central portion is substantially smaller than a corresponding diameter of the platform. An array of electrodes faces the rear side of the platform to provide an adjustable electrostatic field for tilting the platform.

Claims

1. An electrostatically steerable actuator, the actuator comprising:

a gimbaled platform, a central portion of a rear side of the platform extending outward from the platform, a diameter of the central portion being substantially smaller than a corresponding diameter of the platform, the platform including ridges that extend from the rear side of the platform; and

an electrode unit, the electrode unit comprising;

an array of electrodes facing the rear side of the platform to provide an adjustable electrostatic field to apply an electrostatic force on at least the central portion of the platform for tilting the platform; and

electrically isolated pads, wherein each one of the electrically isolated pads is located within a respective one of the electrodes and is positioned to be contacted by a respective one of the ridges when the platform is tilted so as to limit tilting of the platform.

2. The actuator of claim 1, wherein a front surface of the platform comprises a mirror.

3. The actuator of claim 1, wherein the central portion is grooved.

4. The actuator of claim 1, wherein the platform and the central portion are substantially circular.

5. The actuator of claim 4, wherein the diameter of the central portion is within a range of diameters equal to 40% to 60% of the diameter of the platform.

6. The actuator of claim 5, wherein the diameter of the central portion is substantially equal to half the diameter of the platform.

7. The actuator of claim 1, wherein the electrode array comprises four electrodes.

8. The actuator of claim 7, wherein the electrode array is circular and each electrode of the electrode array is substantially quadrant shaped.

9. The actuator of claim 1, wherein the electrode array is located on a glass substrate.

10. The actuator of claim 9, wherein a conductor of the electrode array is located within a recessed region.

11. The actuator of claim 1, wherein the platform is connected to supporting structure via a torsion bar.

12. The actuator of claim 1, comprising a gimbal ring surrounding the platform.

13. The actuator of claim 1, wherein the gimbaled platform and the central portion are constructed from a single piece of a material.

14. The actuator of claim 13, wherein the material comprises silicon.