Front referenced anode

• US 9,340,893 B2
• Filed: 04/03/2015
• Issued: 05/17/2016
• Est. Priority Date: 09/10/2010
• Status: Active Grant

• Current Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Original Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Inventors: Feng, Jingbin, Stowell, R. Marshall, Ghongadi, Shantinath, He, Zhian, Wilmot, Frederick Dean
• Primary Examiner(s): Van, Luan
• Assistant Examiner(s): Keeling, Alexander W
• Application Number:
  US14/678,686
• Publication Number:
  US 20150211144A1
• Time in Patent Office: 410 Days
• Field of Search: 204/297.01
• US Class Current: 1/1
• CPC Class Codes: C25D 17/001 Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
• CPC Class Codes: C25D 17/06 Suspending or supporting devices for articles to be coated
• CPC Class Codes: C25D 17/10 Electrodes , e.g. composition, counter electrode
• CPC Class Codes: C25D 17/12 Shape or form C25D17/14 takes precedence
• CPC Class Codes: C25D 21/12 Process control or regulation controlling or regulating in general G05
• CPC Class Codes: C25D 7/12 Semiconductors
• CPC Class Codes: C25D 7/123 Semiconductors first coated with a seed layer or a conductive layer
• CPC Class Codes: H01L 21/2885 using an external electrical current, i.e. electro-deposition

Abstract

Apparatus and methods for electroplating are described. Apparatus described herein include anode supports including positioning mechanisms that maintain a consistent distance between the surface of the wafer and the surface of a consumable anode during plating. Greater uniformity control is achieved.

Claims

1. A consumable anode for an electroplating apparatus, the consumable anode comprising:

a plurality of sections, wherein each section has a first surface and a second surface, substantially parallel to the first surface, wherein both the first and the second surfaces have a shape of a sector of a circle, wherein each of the sections has a plurality of through channels connecting the first and second surfaces, wherein one of the first and second surfaces has at least one depression configured for registering with a protrusion on a component of an anode assembly, and wherein the at least one depression surrounds at least one through channel of the plurality of the through channels.

2. The consumable anode of claim 1, wherein the sector of the circle has a central angle of 90 degrees and the anode has four sections.

3. The consumable anode of claim 1, wherein the sector of the circle has a central angle of 120 degrees, and the anode has three sections.

4. The consumable anode of claim 1, wherein the sector of the circle has a central angle of 180 degrees and the anode has two sections.

5. The consumable anode of claim 1, wherein each anode segment comprises a plurality of depressions configured for registering with protrusions on a component of an anode assembly.

6. The consumable anode of claim 1, wherein the at least one depression is a circular depression.

7. An anode assembly comprising:

(a) a consumable anode for an electroplating apparatus, the consumable anode comprising a plurality of sections, wherein each section has a first surface and a second surface, substantially parallel to the first surface, wherein both the first and the second surfaces have a shape of a sector of a circle, wherein each of the sections has a plurality of through channels connecting the first and second surfaces, and wherein one of the first and second surfaces has a plurality of depressions;

(b) a support plate comprising a plurality of protrusions configured to register with the plurality of depressions on the consumable anode; and

(c) a base plate comprising a plurality of springs configured to be compressed against the support plate.

8. The anode assembly of claim 7, further comprising a charge plate, wherein the charge plate is connected to a power supply via cables attached to the charge plate.

9. The anode assembly of claim 8, wherein the anode segments are bolted to the charge plate.

10. The anode assembly of claim 7, wherein at least two anode segments are fastened to each other.

11. The anode assembly of claim 7, wherein the base plate further comprises a plurality of guiding rods, wherein said guiding rods are configured to pass through a portion of the plurality of through channels of the consumable anode.

12. The anode assembly of claim 11, wherein each guiding rod is located in the center of each spring of the plurality of springs.

13. An anode assembly comprising:

(a) a consumable anode for an electroplating apparatus, the consumable anode comprising a plurality of sections, wherein each section has a first surface and a second surface, substantially parallel to the first surface, wherein both the first and the second surfaces have a shape of a sector of a circle, wherein each of the sections has a plurality of through channels connecting the first and second surfaces, and wherein one of the first and second surfaces has a plurality of depressions;

(b) a support plate comprising a plurality of protrusions configured to register with the plurality of depressions on the consumable anode; and

(c) fasteners passing through the plurality of through channels of the anode.

14. The anode assembly of claim 13, wherein the fasteners are bolts attaching the anode segments to a charge plate.