Bias reduction in force rebalanced accelerometers

• US 9,341,646 B2
• Filed: 12/19/2012
• Issued: 05/17/2016
• Est. Priority Date: 12/19/2012
• Status: Active Grant

• Current Assignee: Northrop Grumman Guidance & Electronics Co., Inc. (Northrop Grumman Corporation)
• Original Assignee: Northrop Grumman Guidance & Electronics Co., Inc. (Northrop Grumman Corporation)
• Inventors: Stewart, Robert E.
• Primary Examiner(s): Fitzgerald, John
• Assistant Examiner(s): PHAN, TRUONG D
• Application Number:
  US13/720,231
• Publication Number:
  US 20140165691A1
• Time in Patent Office: 1,245 Days
• Field of Search: 73/13.8, 735/141.7, 735/141.8, 735/143.2
• US Class Current: 1/1
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/131 with electrostatic counterbalancing means
• CPC Class Codes: G01P 21/00 Testing or calibrating of apparatus or devices covered by the preceding groups

Abstract

A system is provided for the continuous reduction, in real time, of bias in a force rebalanced accelerometers having a proof mass coupled to an accelerometer housing by a flexure suspension. The system comprises a closed loop, force rebalance servo that provides control voltage to the proof mass to null an electrical pickoff signal that indicates the motion of the proof mass with respect to the accelerometer housing, wherein a time varying disturbance signal is injected into the force rebalance servo that results in the generation of a time varying voltage in the output of the force rebalance servo that corresponds to a magnitude of the net positive spring of the combined flexure suspension and electrostatic springs acting on the proofmass. The system also comprises a negative electrostatic spring servo that applies a negative electrostatic spring DC voltage to each of a pair of negative electrostatic forcer electrodes.

Claims

1. A system for reducing bias in an accelerometer having a proofmass coupled to an accelerometer housing by a flexure suspension and a pair of negative electrostatic forcer electrodes spaced apart from the proofmass on opposing sides, the system comprising:

a force rebalance servo that provides a control voltage to the proofmass in response to an electrical pickoff signal, the electrical pickoff signal indicating motion of the proofmass relative to the accelerometer housing, wherein a predetermined time varying disturbance signal is injected into the force rebalance servo that results in the generation of a time varying voltage in the control voltage, the time varying voltage corresponding to a magnitude of a net positive spring force of the combined flexure suspension and electrostatic spring associated with bias voltages acting on the proofmass as the proofmass moves in response to the time varying voltage in the control voltage; and

a negative electrostatic spring servo that applies a negative electrostatic spring DC voltage to the pair of negative electrostatic forcer electrodes to cancel the net positive spring force of the combined flexure suspension and electrostatic spring associated with bias voltages acting on the proofmass in response to the nulling of the time varying voltage from the control voltage.

2. The system of claim 1, wherein the predetermined time varying disturbance signal is generated as a pseudorandom frequency AC signal.

3. The system of claim 1, wherein the negative electrostatic spring servo comprises a gain amplifier that amplifies a capacitance coupled version of the control voltage output from the force rebalance servo and a demodulator that demodulates the amplified capacitance coupled version of the control voltage with respect to the predetermined time varying disturbance signal.

4. The system of claim 3, wherein the negative electrostatic spring servo further comprises a servo compensation amplifier that integrates the demodulated amplified capacitance coupled version of the control voltage to provide the negative electrostatic spring DC voltage.

5. The system of claim 1, wherein the electrical pickoff signal is a phase difference signal generated at the proofmass in response to capacitance changes caused by the motion of the proofmass with respect to the accelerometer housing and interaction with a first AC excitation signal applied to a first capacitive pickoff electrode and a second AC excitation signal applied to a second capacitive pickoff electrode, wherein the first capacitive pickoff electrode and the second capacitive pickoff electrode are disposed at opposite sides of the proofmass and the first AC excitation signal is 180°

out of phase with the second AC excitation signal.

6. The system of claim 5, wherein a first DC voltage is applied to a first electrostatic forcer electrode and a second DC voltage is applied to a second electrostatic forcer electrode, wherein the first electrostatic forcer electrode and the second electrostatic forcer electrode are disposed at opposite sides of the proofmass and the first DC voltage is of opposite polarity than the second DC voltage, such that the control voltage applied to the proofmass interacts with the first DC voltage and second DC voltage to generate an electrostatic force to move the proofmass to the pickoff electrical null.

7. The system of claim 5, wherein a first DC voltage is applied to the first capacitive pickoff electrode and a second DC voltage is applied to the second capacitive pickoff electrode, wherein the first DC voltage is of opposite polarity than the second DC voltage, such that the control voltage applied to the proofmass interacts with the first DC voltage and second DC voltage to generate an electrostatic force to move the proofmass to the pickoff electrical null.

8. The system of claim 5, wherein the force rebalance servo comprises a gain amplifier that amplifies the electrical pickoff signal and a demodulator that demodulates the amplified electrical pickoff signal with respect to the first AC excitation signal to generate an error voltage.

9. The system of claim 8, wherein the force rebalance servo comprises a servo compensation amplifier that integrates the error voltage to provide the control voltage to be applied to force rebalance the proofmass to the electrical pickoff null.

10. The system of claim 9, wherein the predetermined time varying disturbance signal is injected into a summing node with the error voltage to provide the control voltage comprising the time varying voltage to the servo compensation amplifier to force rebalance the proofmass to the electrical pickoff null.

11. An accelerometer system comprising:

a proofmass coupled to an accelerometer housing by a flexure suspension and a pair of negative electrostatic forcer electrodes spaced apart from the proofmass on opposing sides;

a force rebalance servo that provides a control voltage to the proofmass in response to an electrical pickoff signal that indicates motion of the proofmass relative to the accelerometer housing, wherein a predetermined time varying disturbance signal is injected into a summing node of the force rebalance servo that results in the generation of a time varying voltage in the control voltage, the time varying voltage corresponding to a magnitude of the net positive spring force of the combined flexure suspension and electrostatic spring associated with bias voltages acting on the proofmass as it moves in response to the control voltage; and

a negative electrostatic spring servo that applies a negative electrostatic spring DC voltage to each of the pair of negative electrostatic forcer electrodes to cancel the net positive spring of the combined flexure suspension and electrostatic spring associated with bias voltages acting on the proofmass in response to the nulling of the time varying voltage from the control voltage.

12. The system of claim 11, wherein the negative electrostatic spring servo comprises:

a gain amplifier that amplifies a capacitance coupled version of the control voltage output from the force rebalance servo;

a demodulator that demodulates the amplified capacitance coupled version of the control voltage with respect to the predetermined time varying disturbance signal; and

a servo compensation amplifier that integrates the amplified demodulated capacitance coupled version of the control voltage to provide the negative electrostatic spring DC voltage.

13. The system of claim 11, wherein the predetermined time varying disturbance signal is generated as a pseudorandom frequency AC signal.

14. The system of claim 11, wherein the electrical pickoff signal is a phase difference signal generated at the proofmass in response to a capacitance change caused by the motion of the proofmass with respect to the accelerometer housing and interaction with a first AC excitation signal applied to a first capacitive pickoff electrode and a second AC excitation signal applied to a second capacitive pickoff electrode, wherein the first capacitive pickoff electrode and the second capacitive pickoff electrode are disposed at opposite sides of the proofmass and the first AC excitation signal is 180°

out of phase with the second AC excitation signal.

15. The system of claim 14, wherein a first DC voltage is applied to the first capacitive pickoff electrode and a second DC voltage is applied to the second capacitive pickoff electrode, wherein the first DC voltage is of opposite polarity than the second DC voltage, such that the control voltage applied to the proofmass interacts with the first DC voltage and second DC voltage to generate an electrostatic force to move the proofmass to the pickoff electrical null.

16. The system of claim 14, wherein a first DC voltage is applied to a first electrostatic forcer electrode and a second DC voltage is applied to a second electrostatic forcer electrode, wherein the first electrostatic forcer electrode and the second electrostatic forcer electrode are disposed at opposite sides of the proofmass and a first DC voltage is of opposite polarity than the second DC voltage, such that the control voltage applied to the proofmass interacts with the first DC voltage and second DC voltage to move the proofmass to the pickoff electrical null.

17. The system of claim 16, wherein the force rebalance servo comprises:

a gain amplifier that amplifies the electrical pickoff signal;

a demodulator that demodulates the amplified electrical pickoff signal to generate an error voltage based on the first AC excitation signal; and

a servo compensation amplifier that integrates the error voltage to provide a control voltage to be applied to the proofmass, wherein the predetermined time varying disturbance signal is injected into the summing node with the error voltage to provide the control voltage comprising the time varying voltage to the servo compensation amplifier to force rebalance the proofmass to the electrical pickoff null.

18. A method for reducing bias in an accelerometer having a proofmass coupled to an accelerometer housing by a flexure suspension and a pair of negative electrostatic forcer electrodes spaced apart from the proofmass on opposing sides, the method comprising:

injecting a predetermined time varying disturbance signal into a force rebalance servo that results in the generation of a control voltage that comprises a time varying voltage that corresponds to a magnitude of a net positive spring force of the combined flexure suspension and electrostatic spring associated with bias voltages acting on the proofmass as it the proofmass moves in response to the control voltage; and

applying a negative electrostatic spring DC voltage to each of a pair of negative electrostatic forcer electrodes to cancel the net positive spring of the combined flexure suspension and electrostatic spring associated with bias voltages acting on the proofmass in response to the nulling of the time varying voltage from the control voltage.

19. The method of claim 18, further comprising;

demodulating the control voltage with respect to the predetermined time varying disturbance signal;

integrating the demodulated control voltage to provide a negative electrostatic spring DC voltage; and

applying the negative electrostatic spring DC voltage to each of the pair of negative electrostatic forcer electrodes to cancel the net positive spring of the flexure suspension and electrostatic spring associated with bias voltages acting on the proofmass in response to time varying voltage from the control voltage.

20. The method of claim 18, further comprising:

applying a first AC excitation signal to a first capacitive pickoff electrode;

applying a second AC excitation signal to a second capacitive pickoff electrode, wherein the first capacitive pickoff electrode and the second capacitive pickoff electrode are disposed at opposite sides of the proofmass and the first AC excitation signal is 180°

out of phase with the second AC excitation signal;

capturing and demodulating a phase difference pickoff signal generated at the proofmass in response to a capacitance change due to the motion of the proofmass with respect to the accelerometer housing and interaction with the first AC excitation signal and the second AC excitation signal to generate an error voltage; and

integrating the error voltage to generate the control voltage.

21. The method of claim 20, further comprising:

applying a first DC voltage to a first electrostatic forcer electrode; and

applying a second DC voltage to a second electrostatic forcer electrode, wherein the first electrostatic forcer electrode and the second electrostatic forcer electrode are disposed at opposite sides of the proofmass and the first DC voltage is of opposite polarity than the second DC voltage, such that the control voltage applied to the proofmass interacts with the first DC voltage and second DC voltage to generate an electrostatic force to move the proofmass to a pickoff electrical null.

22. The method of claim 20, further comprising:

applying a first DC voltage to the first capacitive pickoff electrode;

applying a second DC voltage to the second capacitive pickoff electrode, such that the control voltage applied to the proofmass interacts with the first DC voltage and second DC voltage to generate an electrostatic force to move the proofmass to the pickoff electrical null.

23. The method of claim 20, further comprising generating the predetermined time varying disturbance signal as a pseudorandom frequency AC signal.