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Spatial light modulator unit, illumination optical system, exposure device, and device manufacturing method

  • US 9,341,956 B2
  • Filed: 01/12/2012
  • Issued: 05/17/2016
  • Est. Priority Date: 12/23/2009
  • Status: Active Grant
First Claim
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1. A spatial light modulator unit which modulates an intensity distribution of light, the unit comprising:

  • a spatial light modulator arranged in an optical path of the light, which deflects a first part of the light and a second part of the light in different directions;

    a lens element arranged in the optical path on an incidence side of the spatial light modulator; and

    a light intensity modulator arranged in the optical path on an incidence side of the lens element, which modulates the light so that intensities of the first and second part of the light are different from each other on the spatial light modulator via the lens element,wherein the lens element forms an optical Fourier transform plane of a plane where the light intensity modulator is located, andwherein the spatial light modulator is located approximately at the optical Fourier transform plane.

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