Spatial light modulator unit, illumination optical system, exposure device, and device manufacturing method
First Claim
1. A spatial light modulator unit which modulates an intensity distribution of light, the unit comprising:
- a spatial light modulator arranged in an optical path of the light, which deflects a first part of the light and a second part of the light in different directions;
a lens element arranged in the optical path on an incidence side of the spatial light modulator; and
a light intensity modulator arranged in the optical path on an incidence side of the lens element, which modulates the light so that intensities of the first and second part of the light are different from each other on the spatial light modulator via the lens element,wherein the lens element forms an optical Fourier transform plane of a plane where the light intensity modulator is located, andwherein the spatial light modulator is located approximately at the optical Fourier transform plane.
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Accused Products
Abstract
According to one embodiment, a spatial light modulator unit is used in the illumination optical system for illuminating an illumination target surface with light from a light source and comprises: a spatial light modulator with a plurality of optical elements arrayed in a predetermined plane and controlled individually; a spatial light modulation element which applies spatial light modulation to the incident light from the light source and which makes rays of intensity levels according to positions of the respective optical elements, incident on the plurality of optical elements; and a control unit which individually controls the plurality of optical elements on the basis of information about the intensity levels of the rays incident on the respective optical elements.
17 Citations
24 Claims
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1. A spatial light modulator unit which modulates an intensity distribution of light, the unit comprising:
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a spatial light modulator arranged in an optical path of the light, which deflects a first part of the light and a second part of the light in different directions; a lens element arranged in the optical path on an incidence side of the spatial light modulator; and a light intensity modulator arranged in the optical path on an incidence side of the lens element, which modulates the light so that intensities of the first and second part of the light are different from each other on the spatial light modulator via the lens element, wherein the lens element forms an optical Fourier transform plane of a plane where the light intensity modulator is located, and wherein the spatial light modulator is located approximately at the optical Fourier transform plane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification