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Sealing structure, device, and method for manufacturing device

  • US 9,343,706 B2
  • Filed: 03/05/2014
  • Issued: 05/17/2016
  • Est. Priority Date: 03/07/2013
  • Status: Active Grant
First Claim
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1. A device comprising:

  • a first substrate comprising a groove portion;

    an object over the first substrate;

    a second substrate over the object; and

    a sealant between the first substrate and the second substrate and surrounding the object and the groove portion,wherein the groove portion is located between the object and the sealant, andwherein at least part of a surface of the groove portion is exposed.

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