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Energy beam size verification

  • US 9,347,770 B2
  • Filed: 06/25/2015
  • Issued: 05/24/2016
  • Est. Priority Date: 08/20/2014
  • Status: Active Grant
First Claim
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1. A non-transitory computer program product comprising at least one non-transitory computer-readable storage medium having computer-readable program code portions embodied therein, the computer-readable program code portions comprising:

  • an executable portion configured for generating a first energy beam spot from a first energy beam source having a predetermined size and power at a first position on a work piece,an executable portion configured for varying at least one of a focus lens setting or an astigmatism lens setting for said first energy beam spot until max intensity for the first beam spot is detected,an executable portion configured for comparing at least one setting of said focus lens and/or astigmatism lens for said detected maximum intensity of the first energy beam spot with corresponding stored settings of said focus lens and/or astigmatism lens for the first energy beam spot with said predetermined size and power,an executable portion configured for repeating said generating, varying, and comparing steps for different predetermined beam powers, andan executable portion configured for repeating said generating, varying, comparing, and said repetition thereof steps for different positions on said work piece, wherein said first energy beam spot size is verified if each detected settings of said focus lens and/or astigmatism lens are deviating less than a predetermined value from corresponding stored settings of said focus lens and/or astigmatism lens.

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