Cross-section processing-and-observation method and cross-section processing-and-observation apparatus
First Claim
1. A cross-section processing-and-observation method comprising:
- a cross-section exposure step of irradiating a sample with a focused ion beam to expose a cross-section of the sample;
a cross-sectional image acquisition step of irradiating the cross-section with an electron beam to acquire a cross-sectional image of the cross-section;
a step of repeatedly performing the cross-section exposure step and the cross-sectional image acquisition step along a predetermined direction of the sample at a setting interval to acquire a plurality of cross-sectional images of the sample; and
a specific observation target detection step of detecting a predetermined specific observation target from the cross-sectional image acquired at the cross-sectional image acquisition step;
wherein in the specific observation target detection step, after a predetermined specific observation target is detected, the setting interval of the cross-section exposure step is set to be shorter than that before the specific observation target is detected.
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Abstract
A cross-section processing-and-observation method, including a cross-section exposure step in which a sample is irradiated with a focused ion beam to expose a cross-section of the sample, and a cross-sectional image acquisition step in which the cross-section is irradiated with an electron beam to acquire a cross-sectional image of the cross-section. The cross-section exposure step and the cross-sectional image acquisition step are repeatedly performed along a predetermined direction of the sample at a setting interval to acquire multiple cross-sectional images of the sample. The method also includes a specific observation target detection step in which a predetermined specific observation target from the cross-sectional image acquired a the cross-sectional image acquisition step is detected. In the specific observation target detection step, after a predetermined specific observation target is detected, the setting interval of the cross-section exposure step is set to be shorter than that before the specific observation target is detected.
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Citations
13 Claims
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1. A cross-section processing-and-observation method comprising:
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a cross-section exposure step of irradiating a sample with a focused ion beam to expose a cross-section of the sample; a cross-sectional image acquisition step of irradiating the cross-section with an electron beam to acquire a cross-sectional image of the cross-section; a step of repeatedly performing the cross-section exposure step and the cross-sectional image acquisition step along a predetermined direction of the sample at a setting interval to acquire a plurality of cross-sectional images of the sample; and a specific observation target detection step of detecting a predetermined specific observation target from the cross-sectional image acquired at the cross-sectional image acquisition step; wherein in the specific observation target detection step, after a predetermined specific observation target is detected, the setting interval of the cross-section exposure step is set to be shorter than that before the specific observation target is detected. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A cross-section processing-and-observation apparatus comprising:
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a sample stage on which a sample is to be placed; a focused ion beam column configured to irradiate the sample with a focused ion beam; an electron beam column configured to irradiate the sample with an electron beam; one of a secondary electron detector and a backscattered electron detector configured to detect one of secondary electrons and backscattered electrons generated from the sample; and a control unit configured to repeatedly perform a cross-section exposure step in which the sample is irradiated with a focused ion beam emitted from the focused ion beam column to expose a cross-section of the sample, and a cross-sectional image acquisition step in which the cross-section is irradiated with an electron beam emitted from the electron beam column to acquire a cross-sectional image of the cross-section along a predetermined direction of the sample at a setting interval; wherein the control unit is further configured to periodically perform a specific observation target detection step of detecting a predetermined specific observation target from the cross-sectional image acquired at the cross-sectional image acquisition step; and wherein in the specific observation target detection step, after a predetermined specific observation target is detected, the setting interval of the cross-section exposure step is set to be shorter than that before the specific observation target is detected. - View Dependent Claims (13)
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Specification