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Cross-section processing-and-observation method and cross-section processing-and-observation apparatus

  • US 9,347,896 B2
  • Filed: 09/02/2014
  • Issued: 05/24/2016
  • Est. Priority Date: 09/03/2013
  • Status: Active Grant
First Claim
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1. A cross-section processing-and-observation method comprising:

  • a cross-section exposure step of irradiating a sample with a focused ion beam to expose a cross-section of the sample;

    a cross-sectional image acquisition step of irradiating the cross-section with an electron beam to acquire a cross-sectional image of the cross-section;

    a step of repeatedly performing the cross-section exposure step and the cross-sectional image acquisition step along a predetermined direction of the sample at a setting interval to acquire a plurality of cross-sectional images of the sample; and

    a specific observation target detection step of detecting a predetermined specific observation target from the cross-sectional image acquired at the cross-sectional image acquisition step;

    wherein in the specific observation target detection step, after a predetermined specific observation target is detected, the setting interval of the cross-section exposure step is set to be shorter than that before the specific observation target is detected.

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