X-ray pixels including double photoconductors and X-ray detectors including the X-ray pixels

• US 9,348,037 B2
• Filed: 09/28/2010
• Issued: 05/24/2016
• Est. Priority Date: 04/01/2010
• Status: Active Grant

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Kim, Sang-wook, Park, Jae-chul, Kim, Sun-il, Kim, Chang-jung
• Primary Examiner(s): Pert, Evan
• Assistant Examiner(s): Cruz, Leslie Pilar
• Application Number:
  US12/923,553
• Publication Number:
  US 20110241143A1
• Time in Patent Office: 2,065 Days
• US Class Current: 1/1
• CPC Class Codes: G01T 1/242 Stacked detectors, e.g. for depth information constructional or manufacturing details H01L25/00
• CPC Class Codes: H01L 31/085 the device being sensitive to very short wavelength, e.g. X-ray, Gamma-rays

Abstract

Example embodiments are directed to X-ray detectors including double photoconductors. According to example embodiments, the X-ray detector includes a first photoconductor on which X-rays are incident, and a second photoconductor on which X-rays transmitted through the first photoconductor are incident. The first photoconductor and the second photoconductor include a tandem structure. The first photoconductor is formed of silicon and absorbs X-rays in a low energy band, and the second photoconductor is formed of a material that absorbs X-rays in an energy band higher than the low energy band of the X-rays absorbed by silicon.

Claims

1. A pixel of an X-ray detector, the pixel comprising:

a first photoconductor configured to generate electron-hole pairs in response to X-rays incident on the first photoconductor;

a first electrical circuit configured to detect at least one electron or hole generated by the first photoconductor and convert the electron or hole into a first electrical signal, the first electrical circuit including a first transistor;

a second photoconductor on the first photoconductor, the second photoconductor configured to generate electron-hole pairs in response to X-rays transmitted through the first photoconductor;

a second electrical circuit configured to detect at least one electron or hole generated by the second photoconductor and convert the electron or hole into a second electrical signal, the second electrical circuit including a second transistor;

X-ray blocking lavers below the first transistor and the second transistor and respectively corresponding to the first transistor and the second transistor;

a first common electrode and a first pixel electrode respectively on opposite surfaces of the first photoconductor; and

a second common electrode and a second pixel electrode respectively on opposite surfaces of the second photoconductor;

wherein the X-rays incident on the first photoconductor are of a lower energy band compared to the X-rays incident on the second photoconductor,

wherein the first photoconductor and the second photoconductor are formed of different material from each other, and

wherein the first electrical circuit is electrically connected to the first pixel electrode.

2. The pixel of claim 1, wherein the first photoconductor includes silicon.

3. The pixel of claim 1, wherein the first electrical circuit includes a first capacitor.

4. The pixel of claim 3, wherein the second electrical circuit includes a second capacitor, and is electrically connected to the second pixel electrode.

5. The pixel of claim 4,

wherein the X-ray blocking layers are configured to block X-rays from being incident on the first transistor and the second transistor.

6. The pixel of claim 5, wherein the first photoconductor layer includes the X-ray blocking layers.

7. The pixel of claim 5, wherein the X-ray blocking layers include lead (Pb).

8. The pixel of claim 4, wherein a channel of each of the first transistor and the second transistor includes of any one of amorphous silicon, polysilicon, and an oxide semiconductor.

9. The pixel of claim 8, wherein the oxide semiconductor includes ZnO, or a compound including ZnO and at least one selected from a group consisting of gallium (Ga), indium (In), hafnium (Hf), tin (Sn), tantalum (Ta), and yttrium (Y).

10. The pixel of claim 4, further comprising:

a substrate including the first capacitor and the second capacitor on the substrate;

wherein the substrate faces the second photoconductor layer, the first and second transistors, and the first and second capacitors.

11. The pixel of claim 1, wherein the second photoconductor layer includes at least one selected from a group consisting of amorphous selenium (a-Se), HgI₂, PbI₂, CdTe, CdZnTe, and PbO.

12. The pixel of claim 1, wherein the first photoconductor and the second photoconductor include a tandem structure.

13. An X-ray detector including the pixel of claim 1.

14. A pixel of an X-ray detector, the pixel comprising:

a first photoconductor configured to generate electron-hole pairs in response to X-rays incident on the first photoconductor;

a first electrical circuit on the first photoconductor configured to detect at least one electron or hole generated by the first photoconductor and convert the electron or hole into a first electrical signal, the first electrical circuit including a first transistor;

a second photoconductor on the first photoconductor, the second photoconductor configured to generate electron-hole pairs in response to X-rays transmitted through the first photoconductor;

a second electrical circuit on the first photoconductor configured to detect at least one electron or hole generated by the second photoconductor and convert the electron or hole into a second electrical signal, the second electrical circuit including a second transistor;

X-ray blocking layers below the first transistor and the second transistor and respectively corresponding to the first transistor and the second transistor,

a first common electrode and a first pixel electrode respectively on opposite surfaces of the first photoconductor; and

a second common electrode and a second pixel electrode respectively on opposite surfaces of the second photoconductor;

wherein the X-rays incident on the first photoconductor are of a lower energy band compared to the X-rays incident on the second photoconductor,

wherein the first photoconductor and the second photoconductor are formed of different material from each other,

wherein the first electrical circuit is electrically connected to the first pixel electrode, and

wherein the first and second electrical circuits are between the first and second photoconductors, or wherein the first and second electrical circuits are on the first and second photoconductors.

15. A pixel of an X-ray detector, the pixel comprising:

a first photoconductor configured to generate electron-hole pairs in response to X-rays incident on the first photoconductor;

a first electrical circuit on the first photoconductor configured to detect at least one electron or hole generated by the first photoconductor and convert the electron or hole into a first electrical signal, the first electronic circuit including a first transistor;

a second photoconductor on the first electrical circuit, the second photoconductor configured to generate electron-hole pairs in response to X-rays transmitted through the first photoconductor;

a second electrical circuit configured to detect at least one electron or hole generated by the second photoconductor and convert the electron or hole into a second electrical signal, the second electrical circuit including a second transistor;

X-ray blocking layers below the first transistor and the second transistor and respectively corresponding to the first transistor and the second transistor

a first common electrode and a first pixel electrode respectively on opposite surfaces of the first photoconductor; and

a second common electrode and a second pixel electrode respectively on opposite surfaces of the second photoconductor;

wherein the X-rays incident on the first photoconductor are of a lower energy band compared to the X-rays incident on the second photoconductor,

wherein the first photoconductor and the second photoconductor are formed of different material from each other, and

wherein the first electrical circuit is electrically connected to the first pixel electrode.