Remote plasma system having self-management function and self management method of the same

• US 9,349,575 B2
• Filed: 08/27/2013
• Issued: 05/24/2016
• Est. Priority Date: 05/22/2013
• Status: Active Grant

• Current Assignee: New Power Plasma Co., Ltd.
• Original Assignee: Dai Kyu Choi
• Inventors: Choi, Dai Kyu
• Primary Examiner(s): Owens, Douglas W
• Assistant Examiner(s): Sathiraju, Srinivas
• Application Number:
  US14/011,197
• Publication Number:
  US 20140346952A1
• Time in Patent Office: 1,001 Days
• US Class Current: 1/1
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream
• CPC Class Codes: H01J 37/32917 Plasma diagnostics
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H01J 37/3299 Feedback systems
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence
• CPC Class Codes: H05H 1/463 using antennas or applicators

Abstract

A remote plasma system having a self-management function measures an operating state of a remote plasma generator while a remote plasma generator operates, which generates plasma and remotely supplies the generated plasma to a process chamber, thereby allowing a process manager to check the measured operating state and performing a required process control depending on an operating state. According to the remote plasma system having the self-management function, it is possible to check operating state information of the remote plasma generator and plasma treatment process progress state information in the process chamber in real time so as to determine whether the remote plasma generator normally operates and immediately sense occurrence of an error during the operation.

Claims

1. A remote plasma system having a self management function, the remote plasma system comprising:

a remote plasma generator for generating plasma and remotely supplying the generated plasma to a process chamber;

a sensor unit including;

one or more voltage measurement sensors for measuring voltage induced to a generator body of the remote plasma generator, and

a plasma measurement sensor for measuring exhaust gas from the process chamber and generating a plasma measurement value corresponding to a measured state of the exhaust gas; and

a control unit for generating operating state information of the remote plasma generator based on the measured voltage and for generating process progress state information associated with the process chamber based on the plasma measurement value corresponding to a measured state of the exhaust gas.

2. The remote plasma system of claim 1, wherein

the sensor unit further includes:

one or more current measurement sensors for measuring current that leaks through the generator body of the remote plasma generator to obtain a leakage current measurement value, and

wherein the control unit is to generate another operating state information based on the leakage current measurement value.

3. The remote plasma system of claim 1, wherein

the sensor unit further includes:

a current transformer installed around a gas outlet of the remote plasma generator to measure an electrical current of the generator body, and

wherein the control unit is to generate another operating state information based on the measured electrical current of the generator body.

4. The remote plasma system of claim 1, wherein

the sensor unit further includes:

a plasma measurement sensor for measuring plasma generated in the generator body of the remote plasma generator and for generating a plasma measurement value corresponding to a measured state of plasma in the generator body, and

wherein the control unit is to generate another operating state information of the remote plasma generator based on the plasma measurement value corresponding to a measured state of plasma in the generator body.

5. The remote plasma system of claim 1, wherein

the sensor unit further includes:

a plasma measurement sensor for measuring a state of plasma that flows into the process chamber and for generating a plasma measurement value corresponding to a measured state of plasma that flows into the process chamber, and

wherein the control unit is to generate process progress state information in the process chamber based on the plasma measurement value corresponding to a measured state of plasma that flows into the process chamber.

6. The remote plasma system of claim 1, wherein

generator body includes a plasma discharge space;

the remote plasma system of claim 1, further comprising;

a transformer having a magnetic core and a primary wire wound to the magnetic core that are installed in the generator body so as to supply electromotive force for forming plasma in the plasma discharge space of the generator body; and

a power supply to supply driving power to the primary wire of the transformer.

7. The remote plasma system of claim 6, further comprising:

a capacitively coupled electrode connected to the power supply and installed in the generator body so as to supply the electromotive force for forming the plasma in the plasma discharge space of the generator body.

8. The remote plasma system of claim 6, further comprising:

an induction antenna coil connected to the power supply and installed in the generator body so as to supply the electromotive force for forming the plasma to the plasma discharge space of the generator body.

9. The remote plasma system of claim 1, wherein

the generator body is metallic and includes two or more divided regions divided into one or more insulation sections, and

the one or more voltage measurement sensors include two or more voltage measurement sensors installed in each of the two or more divided regions of the generator body.

10. The remote plasma system of claim 2, wherein

the generator body is metallic and includes a plasma discharge space and two or more divided regions divided into one or more insulation sections, and

the one or more current measurement sensors include two or more current measurement sensors installed in the two or more divided regions of the generator body.

11. A self management method of a remote plasma system, the method comprising:

starting an operation of a remote plasma generator including a generator body and a process chamber in communication with the generator body;

measuring, via one or more voltage measurement sensors of a sensor unit, a voltage induced in the generator body;

measuring, via a plasma measurement sensor of the sensor unit, exhaust gas from the process chamber;

generating a plasma measurement value corresponding to a measured state of the exhaust gas;

generating operating state information of the remote plasma generator based on the measured voltage; and

generating process progress state information in the process chamber based on the plasma measurement value the plasma measurement value corresponding to a measured state of the exhaust gas.

12. The self management method of claim 11, further comprising:

measuring, via a current measurement sensor of the sensor unit, current that leaks through the generator body of the remote plasma generator to obtain a leakage current measurement value; and

generating another operating state information based on the leakage current measurement value.

13. The self management method of claim 11,

wherein the sensor unit further includes a current transformer installed around a gas outlet of the remote plasma generator, the method further comprising:

measuring, via the current transformer, an electrical current of the generator body; and

generating another operating state information based on the measured electrical current of the generator body.

14. The self management method of claim 11, further comprising:

measuring, via a plasma measurement sensor, plasma generated in the generator body of the remote plasma generator;

obtaining a plasma measurement value corresponding to a measured state of the plasma in the generator body; and

generating another operating state information based on the plasma measurement value corresponding to a measured state of the plasma in the generator body.

15. The self management method of claim 11, further comprising:

measuring, via a plasma measurement sensor, a state of plasma that flows into the process chamber;

generating a plasma measurement value corresponding to a measured state of the plasma that flows into the process chamber, and

generating process progress state information associated with the process chamber based on the plasma measurement corresponding to a measured state of the plasma that flows into the process chamber.