Remote plasma system having self-management function and self management method of the same
First Claim
1. A remote plasma system having a self management function, the remote plasma system comprising:
- a remote plasma generator for generating plasma and remotely supplying the generated plasma to a process chamber;
a sensor unit including;
one or more voltage measurement sensors for measuring voltage induced to a generator body of the remote plasma generator, anda plasma measurement sensor for measuring exhaust gas from the process chamber and generating a plasma measurement value corresponding to a measured state of the exhaust gas; and
a control unit for generating operating state information of the remote plasma generator based on the measured voltage and for generating process progress state information associated with the process chamber based on the plasma measurement value corresponding to a measured state of the exhaust gas.
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Abstract
A remote plasma system having a self-management function measures an operating state of a remote plasma generator while a remote plasma generator operates, which generates plasma and remotely supplies the generated plasma to a process chamber, thereby allowing a process manager to check the measured operating state and performing a required process control depending on an operating state. According to the remote plasma system having the self-management function, it is possible to check operating state information of the remote plasma generator and plasma treatment process progress state information in the process chamber in real time so as to determine whether the remote plasma generator normally operates and immediately sense occurrence of an error during the operation.
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Citations
15 Claims
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1. A remote plasma system having a self management function, the remote plasma system comprising:
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a remote plasma generator for generating plasma and remotely supplying the generated plasma to a process chamber; a sensor unit including; one or more voltage measurement sensors for measuring voltage induced to a generator body of the remote plasma generator, and a plasma measurement sensor for measuring exhaust gas from the process chamber and generating a plasma measurement value corresponding to a measured state of the exhaust gas; and a control unit for generating operating state information of the remote plasma generator based on the measured voltage and for generating process progress state information associated with the process chamber based on the plasma measurement value corresponding to a measured state of the exhaust gas. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A self management method of a remote plasma system, the method comprising:
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starting an operation of a remote plasma generator including a generator body and a process chamber in communication with the generator body; measuring, via one or more voltage measurement sensors of a sensor unit, a voltage induced in the generator body; measuring, via a plasma measurement sensor of the sensor unit, exhaust gas from the process chamber; generating a plasma measurement value corresponding to a measured state of the exhaust gas; generating operating state information of the remote plasma generator based on the measured voltage; and generating process progress state information in the process chamber based on the plasma measurement value the plasma measurement value corresponding to a measured state of the exhaust gas. - View Dependent Claims (12, 13, 14, 15)
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Specification