MEMS isolation structures
First Claim
Patent Images
1. A device comprising:
- a substrate formed of a first material;
a trench formed in the substrate;
a second material formed in the trench, the second material having first and second portions formed in the trench, wherein the first and second portions are electrically isolated with respect to one another and electrically isolated with respect to the first material, andan electrically insulating material disposed between the first and second portions and between the substrate and the second material.
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Abstract
A device may comprise a substrate formed of a first semiconductor material and a trench formed in the substrate. A second semiconductor material may be formed in the trench. The second semiconductor material may have first and second portions that are isolated with respect to one another and that are isolated with respect to the first semiconductor material.
128 Citations
27 Claims
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1. A device comprising:
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a substrate formed of a first material; a trench formed in the substrate; a second material formed in the trench, the second material having first and second portions formed in the trench, wherein the first and second portions are electrically isolated with respect to one another and electrically isolated with respect to the first material, and an electrically insulating material disposed between the first and second portions and between the substrate and the second material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A system comprising:
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an actuator device having a substrate formed of a first material; a trench formed in the substrate; a second material formed in the trench, the second material having first and second portions formed in the trench, wherein the first and second portions are electrically isolated with respect to one another and electrically isolated with respect to the first material; and an electrically insulating material disposed between the first and second portions and between the substrate and the second material. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A method comprising:
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forming a trench in a substrate of a first material; forming an isolating layer in the trench; and forming a second material upon the isolating layer such that the second material has two portions that are formed in the trench and are electrically isolated with respect to one another and electrically isolated with respect to the first material by the isolating layer, wherein the isolating layer is permanently disposed between the first material and the second material. - View Dependent Claims (22, 23, 24)
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25. A method comprising:
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moving a moving portion of a MEMS actuator formed of a first material with respect to a fixed portion of the MEMS actuator; and wherein the moving portion is electrically isolated with respect to the fixed portion via a separation in a different second material formed in a trench and wherein the separation comprises an oxide material that is permanently disposed between first and second portions of the different second material, which are formed in the trench, and between the substrate and the different second material. - View Dependent Claims (26, 27)
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Specification