Opto-fluidic system with coated fluid channels

• US 9,354,159 B2
• Filed: 05/02/2013
• Issued: 05/31/2016
• Est. Priority Date: 05/02/2012
• Status: Active Grant

• Current Assignee: Nanoscopia (Cayman), Inc.
• Original Assignee: Nanoscopia (Cayman), Inc.
• Inventors: Vaartstra, Brian
• Primary Examiner(s): Yushin, Nikolay
• Application Number:
  US13/875,595
• Publication Number:
  US 20130307954A1
• Time in Patent Office: 1,125 Days
• US Class Current: 1/1
• CPC Class Codes: G01N 21/01 Arrangements or apparatus for facilitating the optical investigation
• CPC Class Codes: G01N 21/6454 using an integrated detector array
• CPC Class Codes: H01L 27/14603 Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
• CPC Class Codes: H04N 7/18 Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
• CPC Class Codes: Y10T 156/10 Methods of surface bonding and/or assembly therefor

Abstract

An image sensor integrated circuit may contain image sensor pixels. A channel for receiving a fluid with samples may be formed on top of the image sensor. The image sensor pixels may form light sensors and imagers. The imagers may gather images of the samples as the fluid passes over the imagers or when the samples from the fluid adhere to the surface above an imager array. A protective coating may be formed on surfaces of the channel to protect the image sensor pixels and integrated circuit from potentially damaging materials in the fluid, samples, or materials provided for evaluating the samples. The protective coating may be a base-resistant material such as a silylating agent. A cover glass may be attached above the image sensor integrated circuit to form a portion of the channel. The protective coating may be formed on surfaces of the cover glass.

Claims

1. Apparatus, comprising:

an image sensor integrated circuit containing image sensor pixels that form at least one imager;

a fluid channel on the image sensor integrated circuit that is configured to receive a sample containing fluid, wherein the at least one imager is located in the channel;

a protective coating on at least one surface of the fluid channel; and

a barrier layer between the protective coating and image sensor integrated circuit, the barrier layer comprising a transparent material.

2. The apparatus defined in claim 1, further comprising:

a bond layer, wherein the bond layer forms portions of sidewalls of the fluid channel.

3. The apparatus defined in claim 2, further comprising a cover glass layer.

4. The apparatus defined in claim 3, wherein a portion of the protective coating is formed on at least one surface of the cover glass layer.

5. The apparatus defined in claim 4, wherein an additional portion of the protective coating is formed on a bottom surface of the fluid channel.

6. The apparatus defined in claim 1, wherein the protective coating comprises a base-resistant silylating material.

7. The apparatus defined in claim 1, wherein the protective coating comprises a fluorocarbyl material.

8. The apparatus defined in claim 1, further comprising a reactant, wherein the protective coating is interposed between the reactant and the image sensor integrated circuit.

9. The apparatus defined in claim 1, wherein the at least one imager is configured to capture images of biological specimens in the sample containing fluid.

10. The apparatus defined in claim 1, wherein the protective layer is chemically bonded to the at least one surface of the fluid channel.

11. The apparatus defined in claim 1, wherein the protective layer is physically bonded to the at least one surface of the fluid channel.

12. A method of forming a microfluidic system, the method comprising:

obtaining an image sensor integrated circuit having a plurality of image sensor pixels, wherein the plurality of image sensor pixels are formed at a surface of the image sensor integrated circuit that forms a portion of a fluid channel;

forming a barrier layer on the surface of the obtained image sensor integrated circuit, the barrier layer comprising a transparent material; and

forming a protective layer over the barrier layer, wherein the protective layer protects portions of the microfluidic system from substances in a fluid to be introduced into the fluid channel.

13. The method defined in claim 12, further comprising:

depositing a bond layer on the protective layer; and

patterning the bond layer to form sidewalls of the fluid channel.

14. The method defined in claim 13, further comprising:

attaching a cover glass layer to the patterned bond layer.

15. The method defined in claim 12 wherein obtaining the image sensor integrated circuit having the plurality of image sensor pixels comprises obtaining a microfluidic image sensor integrated circuit having a patterned bond layer and a cover glass layer, and wherein the patterned bond layer and the cover glass layer form additional portions of the fluid channel.

16. The method defined in claim 15 wherein forming the protective layer over the surface of the obtained image sensor integrated circuit comprises forming the protective layer on the additional portions of the fluid channel.

17. The method defined in claim 12 wherein forming the protective layer over the surface of the obtained image sensor integrated circuit comprises forming a silylating agent over the surface of the obtained image sensor integrated circuit.

18. A system, comprising:

a central processing unit;

memory;

input-output circuitry; and

an imaging device, wherein the imaging device comprises;

a pixel array having a plurality of imaging pixels;

a fluid channel on the pixel array that is configured to receive a sample containing fluid, wherein the pixel array is located in the channel;

a protective coating on at least one surface of the fluid channel; and

a barrier layer between the protective coating and image sensor integrated circuit, the barrier layer comprising a transparent material.