Inspection device and inspection method
First Claim
Patent Images
1. An inspection device, comprising:
- a light source module, emitting a first incident light and a second incident light to a device under test (DUT);
an image receiving module, receiving a first image generated by the DUT irradiated by the first incident light and a second image generated by the DUT irradiated by the second incident light; and
a processor, calculating a contrast value of the first image and the second image to obtain a high contrast image for inspection;
wherein the DUT comprises a first testing region and a second testing region, and the image receiving module receives a first sub-image generated by the first incident light illuminating the first testing region, a second sub-image generated by the first incident light illuminating the second testing region, a third sub-image generated by the second incident light illuminating the first testing region, and a fourth sub-image generated by the second incident light illuminating the second testing region, and the processor utilizes a predetermined formula to calculate contrast values of the first sub-image, the second sub-image, the third sub-image and the fourth sub-image to obtain the high contrast image for inspection, wherein each of the first sub-image, the second sub-image, the third sub-image, the fourth sub-image and the high contrast image is divided into N regions by the following formula;
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Abstract
The disclosure provides an inspection device including a light source module, an image receiving module and a processing unit. The light source module emits a first incident light and a second incident light to a device under test (DUT). The image receiving module receives a first image corresponding to the DUT irradiated by the first incident light, and receives a second image corresponding to the DUT irradiated by the second incident light. The processing unit calculates the contrast ratio of the first image and the second image to obtain a high-contrast image for inspection.
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Citations
18 Claims
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1. An inspection device, comprising:
- a light source module, emitting a first incident light and a second incident light to a device under test (DUT);
an image receiving module, receiving a first image generated by the DUT irradiated by the first incident light and a second image generated by the DUT irradiated by the second incident light; and
a processor, calculating a contrast value of the first image and the second image to obtain a high contrast image for inspection;
wherein the DUT comprises a first testing region and a second testing region, and the image receiving module receives a first sub-image generated by the first incident light illuminating the first testing region, a second sub-image generated by the first incident light illuminating the second testing region, a third sub-image generated by the second incident light illuminating the first testing region, and a fourth sub-image generated by the second incident light illuminating the second testing region, and the processor utilizes a predetermined formula to calculate contrast values of the first sub-image, the second sub-image, the third sub-image and the fourth sub-image to obtain the high contrast image for inspection, wherein each of the first sub-image, the second sub-image, the third sub-image, the fourth sub-image and the high contrast image is divided into N regions by the following formula;
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
- a light source module, emitting a first incident light and a second incident light to a device under test (DUT);
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10. An inspection method, applied to an inspection device, wherein the inspection device comprises a light source module, an image receiving module and a processor, the inspection method comprising:
- emitting a first incident light and a second incident light to a device under test (DUT) by the light source module;
receiving a first image generated by the DUT irradiated by the first incident light and a second image generated by the DUT irradiated by the second incident light; and
calculating a contrast value of the first image and the second image to obtain a high contrast image for inspection by the processor;
wherein the DUT further comprises a first testing region and a second testing region, and the image receiving module receives a first sub-image generated by the first incident light illuminating the first testing region, a second sub-image generated by the first incident light illuminating the second testing region, a third sub-image generated by the second incident light illuminating the first testing region, and a fourth sub-image generated by the second incident light illuminating the second testing region, and the processor utilizes a predetermined formula to calculate the contrast values of the first sub-image, the second sub-image, the third sub-image and the fourth sub-image to obtain the high contrast image for inspection, wherein each of the first sub-image, the second sub-image, the third sub-image, the fourth sub-image and the high contrast image is divided into N regions by the following formula;
- View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
- emitting a first incident light and a second incident light to a device under test (DUT) by the light source module;
Specification