Integrated electric field sensor
First Claim
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1. An electric field sensor, comprising:
- at least one sensing electrode for detecting an electric field and generating an input signal;
a sensor input connected to the at least one sensing electrode for receiving the input signal;
an integrated amplifier adapted to generate at least one buffered output signal that replicates the input signal, the integrated amplifier comprising a substrate, a package assembly and a plurality of circuit elements integrated on the substrate and enclosed within the package assembly, each circuit element comprising a plurality of terminals, wherein a first portion of the plurality of terminals is connected to the sensor input;
an active shield in electrical communication with an output of the integrated amplifier so that the at least one buffered output signal drives the active shield; and
wherein the first portion of the plurality of terminals is shielded from the substrate and the package assembly by a second portion of the plurality of terminals substantially following one of the input signal and the buffered output signal.
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Abstract
An electric field sensor includes one or more sensing electrodes connected to an integrated amplifier that bootstraps all parasitic capacitances at the sensor input to provide for a very high input impedance without the need for neutralization or other adjustments and calibration. The integrated amplifier for the electric field sensor further includes low-noise ESD/biasing structures to stabilize the DC-potential of the sensor with a minimum amount of added noise, leakage and parasitic capacitance.
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Citations
34 Claims
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1. An electric field sensor, comprising:
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at least one sensing electrode for detecting an electric field and generating an input signal; a sensor input connected to the at least one sensing electrode for receiving the input signal; an integrated amplifier adapted to generate at least one buffered output signal that replicates the input signal, the integrated amplifier comprising a substrate, a package assembly and a plurality of circuit elements integrated on the substrate and enclosed within the package assembly, each circuit element comprising a plurality of terminals, wherein a first portion of the plurality of terminals is connected to the sensor input; an active shield in electrical communication with an output of the integrated amplifier so that the at least one buffered output signal drives the active shield; and wherein the first portion of the plurality of terminals is shielded from the substrate and the package assembly by a second portion of the plurality of terminals substantially following one of the input signal and the buffered output signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. An electric field sensor, comprising:
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at least one sensing electrode for detecting an electric field and generating an input signal; a sensor input connected to the at least one sensing electrode for receiving the input signal; an integrated amplifier adapted to generate at least one buffered output signal that replicates the input signal, the integrated amplifier comprising a substrate, a package assembly and a plurality of circuit elements integrated on the substrate and enclosed within the package assembly, each circuit element comprising a plurality of terminals, wherein a first portion of the plurality of terminals is connected to the sensor input, the integrated amplifier further comprising an input transistor having a gate, a drain, a source and a body terminal, and wherein the gate is connected to the sensor input and the source and the body terminals are connected together; an active shield in electrical communication with an output of the integrated amplifier so that the at least one buffered output signal drives the active shield; wherein the first portion of the plurality of terminals is shielded from the substrate and the package assembly by a second portion of the plurality of terminals substantially following one of the input signal and the buffered output signal. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
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Specification