Illumination system, lithographic apparatus and method

• US 9,360,762 B2
• Filed: 01/30/2012
• Issued: 06/07/2016
• Est. Priority Date: 02/02/2011
• Status: Expired due to Fees

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Tychkov, Andrey Sergeevich
• Primary Examiner(s): Persaud, Deoram
• Application Number:
  US13/361,397
• Publication Number:
  US 20120194794A1
• Time in Patent Office: 1,590 Days
• Field of Search: 355/67, 355/70, 355/71, 359/627, 359/622, 359/623
• US Class Current: 1/1
• CPC Class Codes: G03F 7/70116 Off-axis setting using a programmable means, e.g. liquid crystal display [LCD], digital micromirror device [DMD] or pupil facets

Abstract

An illumination system comprising an array of controllable mirrors configured to direct radiation towards a pupil plane and an array of lenses configured to direct radiation sub-beams towards the array of controllable mirrors, wherein a first lens of the array of lenses and a controllable mirror of the array of controllable mirrors forms a first optical channel having a first optical power and a second lens of the array of lenses and a controllable mirror of the array of controllable mirrors forms a second optical channel having a second optical power, such that a radiation sub-beam formed by the first optical channel has a first cross-sectional area and shape at the pupil plane and a radiation sub-beam formed by the second optical channel has a second different cross-sectional area and/or shape at the pupil plane.

Claims

1. An illumination system comprising an array of controllable mirrors configured to direct radiation towards a pupil plane and an array of lenses configured to direct radiation sub-beams towards the array of controllable mirrors,

wherein a first lens of the array of lenses and a controllable mirror of the array of controllable mirrors forms a first optical channel having a first optical power and a second lens of the array of lenses and a controllable mirror of the array of controllable mirrors forms a second optical channel having a second optical power, and

wherein the first optical power is different from the second optical power.

2. The illumination, system of claim 1, wherein the first optical channel is one of a group of optical channels which have the first optical power, and wherein the second optical channel is one of a group of optical channels which have the second optical power.

3. The illumination system of claim 2, wherein a third group of optical channels is formed by a third group of lenses and controllable mirrors, the third group of optical channels being provided with a third optical power such that radiation sub-beams formed by the third group of optical channels have a third different cross-sectional area and/or shape at the pupil plane.

4. The illumination system of claim 2, wherein at least one group of lenses or controllable mirrors having the same optical power are provided adjacent to one another.

5. The illumination system of claim 4, wherein the group of lenses or controllable mirrors is provided as a row of lenses or controllable mirrors.

6. The illumination system of claim 1, wherein the illumination system further comprises an additional array of lenses, the additional array of lenses being separated along an optical axis of the illumination system from the array of lenses.

7. The illumination system of claim 6, wherein the array of lenses of the additional array of lenses is moveable along an optical axis of the illumination system.

8. The illumination system of claim 7, wherein a subset of the array of lenses or the additional array of lenses is moveable along an optical axis of the illumination system.

9. The illumination system of claim 1, wherein at least some of the lenses of the array of lenses or an additional array of lenses are cylindrical lenses.

10. The illumination system of claim 9, wherein at least some cylindrical lenses which provide optical power in a first direction are provided in the array of lenses, and at least some associated cylindrical lenses which provide optical power in a second substantially perpendicular direction are provided in the additional array of lenses.

11. The illumination system of claim 1, wherein the array of controllable mirrors is one of a plurality of arrays of controllable mirrors.

12. The illumination system of claim 11, wherein at least one of the arrays of controllable mirrors comprises mirrors which have an optical power which is different to the optical power of mirrors of at least one other array of controllable mirrors.

13. The illumination system of claim 1, wherein the array of lenses comprises two lenses that have different optical powers.

14. A lithographic apparatus comprising:

an illumination system configured to provide a beam of radiation comprising;

an array of controllable mirrors configured to direct radiation towards a pupil plane and an array of lenses configured to direct radiation sub-beams towards the array of controllable mirrors,

wherein a first lens of the array of lenses and a controllable mirror of the array of controllable mirrors forms a first optical channel having a first optical power and a second lens of the array of lenses and a controllable mirror of the array of controllable mirrors forms a second optical channel having a second optical power, and

wherein the first optical power is different from the second optical power;

a support structure for supporting a patterning device, the patterning device serving to impart the radiation beam with a pattern in its cross-section;

a substrate table for holding a substrate; and

a projection system for projecting the patterned radiation beam onto a target portion of the substrate.

15. The lithographic apparatus of claim 14, wherein

the first optical channel is one of a first group of optical channels which have the first optical power, and

the second optical channel is one of a second group of optical channels which have the second optical power.

16. The lithographic apparatus of claim 15, wherein a third group of optical channels is formed by a third group of lenses and controllable mirrors, the third group of optical channels being provided with a third optical power such that radiation sub-beams formed by the third group of optical channels have a third different cross-sectional area and/or shape at the pupil plane.

17. The lithographic apparatus of claim 16, wherein at least one group of lenses and controllable mirrors having the same optical power are provided adjacent to one another.

18. The lithographic apparatus of claim 16, wherein at least one group of lenses and controllable mirrors is provided as a row of lenses and controllable mirrors.

19. The lithographic apparatus of claim 14, further comprising an additional array of lenses, the additional array of lenses being separated along an optical axis of the illumination system from the array of lenses.

20. The lithographic apparatus of claim 19, wherein the array of lenses or the additional array of lenses is moveable along an optical axis of the illumination system.

21. The lithographic apparatus of claim 19, wherein a subset of the array of lenses or the additional array of lenses is moveable along an optical axis of the illumination system.

22. The lithographic apparatus of claim 19, wherein at least some of the lenses of the array of lenses or the additional array of lenses are cylindrical lenses.

23. The lithographic apparatus of claim 22, wherein at least some cylindrical lenses which provide optical power in a first direction are provided in the array of lenses, and at least some associated cylindrical lenses which provide optical power in a second substantially perpendicular direction are provided in the additional array of lenses.

24. The lithographic apparatus of claim 14, wherein the array of controllable mirrors is one of the plurality of arrays of controllable mirrors.

25. The lithographic apparatus of claim 24, wherein at least one of the arrays of controllable mirrors comprises mirrors which have an optical power which is different to the optical power of mirrors of at least one other array of controllable mirrors.

26. An illumination system comprising at least two arrays of controllable mirrors for directing radiation towards a pupil plane and at least two associated arrays of lenses configured to direct radiation sub-beams towards the at least two arrays of controllable mirrors;

(a) wherein the lenses and controllable mirrors of the first array form optical channels having a first optical power, and the lenses and controllable mirrors of the second array form optical channels having a second optical power, such that radiation sub-beams formed by the first array of lenses and controllable mirrors have a first cross-sectional area and shape at the pupil plane of the illumination system, and radiation sub-beams formed by the second array of lenses and controllable mirrors have a second different cross-sectional area and/or shape at the pupil plane of the illumination system, and

wherein the first optical power is different from the second optical power.

27. A method of forming an illumination mode, the method comprising:

using an array of lenses to separate a radiation beam into radiation sub-beams which are incident upon mirrors of an array of controllable mirrors, and

using the array of controllable mirrors to direct the sub-beams of radiation towards a pupil plane;

wherein a first lens and a controllable mirror form a first optical channel having a first optical power and a second lens and a controllable mirror form a second optical channel having a second optical power, and wherein the first optical power is different from the second optical power.

28. The method of claim 27, further comprising adjusting the cross-sectional areas of the radiation sub-beams by changing the separation between the array of lenses and an additional array of lenses, wherein the additional array of lenses is separated along an optical axis of an illumination system.