Symmetric dual piezoelectric stack microelectromechanical piezoelectric cantilever energy harvester
First Claim
1. An energy harvester device comprisingan elongate resonator beam extending between first and second ends;
- a base connected to said elongate resonator beam at the first end with the second end being freely extending from said base as a cantilever; and
a mass attached to the second end of said elongate resonator beam, wherein said elongate resonator beam comprises either;
(1) a first oxide layer on a first piezoelectric stack layer over a cantilever layer on a second oxide layer over a second piezoelectric stack layer on a third oxide layer or (2) a first oxide layer on a first piezoelectric stack layer over a second oxide layer on a cantilever layer over a third oxide layer on a second piezoelectric stack over a fourth oxide layer.
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Abstract
The present invention relates to an energy harvester device comprising an elongate resonator beam extending between first and second ends. A base connected to the resonator beam at the first end with the second end being freely extending from the base as a cantilever. A mass is attached to the second end of the elongate resonator beam. The elongate resonator beam comprises either: (1) a first oxide layer on a first piezoelectric stack layer over a cantilever layer on a second oxide layer over a second piezoelectric stack layer on a third oxide layer or (2) a first oxide layer on a first piezoelectric stack layer over a second oxide layer on a cantilever layer over a third oxide layer on a second piezoelectric stack over a fourth oxide layer. Also disclosed is a system comprising an electrically powered apparatus and the energy harvester device, as well as methods of making and using the energy harvester.
28 Citations
23 Claims
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1. An energy harvester device comprising
an elongate resonator beam extending between first and second ends; -
a base connected to said elongate resonator beam at the first end with the second end being freely extending from said base as a cantilever; and a mass attached to the second end of said elongate resonator beam, wherein said elongate resonator beam comprises either;
(1) a first oxide layer on a first piezoelectric stack layer over a cantilever layer on a second oxide layer over a second piezoelectric stack layer on a third oxide layer or (2) a first oxide layer on a first piezoelectric stack layer over a second oxide layer on a cantilever layer over a third oxide layer on a second piezoelectric stack over a fourth oxide layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification