Device for measuring force components, and method for its production
First Claim
1. A device for measuring force components, said device comprises:
- at least one cantilever beam inclined to a wafer plane normal and formed in one piece with a mass body, providing a mass of inertia,wherein said mass body has a first and a second major surface which are substantially parallel with a wafer plane,wherein a mass body cross section presents a portion which is substantially symmetrical along a centrally located plane parallel with said wafer plane,wherein the at least one cantilever beam and the mass body are formed in the same crystal material wafer, andwherein the at least on slanted cantilever beam extends mainly along the wafer plan normal along a thickness of the mass body.
1 Assignment
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Accused Products
Abstract
A device for measuring force components formed from a single crystal material, wherein the device comprises at least one cantilever beam inclined to a wafer plane normal and formed in one piece with a mass body, which mass body provides a mass of inertia. The mass body has a first and a second major surface which are substantially parallel with a wafer plane. A mass body cross section presents a portion which is substantially symmetrical along a centrally (in the thickness direction) located plane parallel with the wafer plane. Disclosed is also a method for its production and an accelerometer comprising at least one such device. The device allow for a more compact 3-axis accelerometer.
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Citations
13 Claims
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1. A device for measuring force components, said device comprises:
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at least one cantilever beam inclined to a wafer plane normal and formed in one piece with a mass body, providing a mass of inertia, wherein said mass body has a first and a second major surface which are substantially parallel with a wafer plane, wherein a mass body cross section presents a portion which is substantially symmetrical along a centrally located plane parallel with said wafer plane, wherein the at least one cantilever beam and the mass body are formed in the same crystal material wafer, and wherein the at least on slanted cantilever beam extends mainly along the wafer plan normal along a thickness of the mass body. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification