Angular velocity detecting device
First Claim
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1. An angular rate detecting device comprising:
- a substrate;
a fixed part connected to the substrate;
a drive frame connected to the fixed part via a plurality of beams and provided so as to vibrate in a drive direction; and
a Coriolis frame connected to the fixed part via the drive frame and provided so as to vibrate in a detect direction perpendicular to the drive direction,wherein the plurality of beams includes at least two groups of beams, each of the groups of beams having;
a first beam extending in the detect direction and connected to the fixed part;
a second beam extending in the drive direction and connected to the first beam; and
a third beam extending in the detect direction and connected to the second beam and the drive frame,wherein the two groups of beams are provided symmetrically with respect to an axis extended in the drive direction and through the fixed part, andwherein the first beams of the two groups are connected to the fixed part between the first beams.
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Abstract
A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is leviated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained.
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Citations
7 Claims
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1. An angular rate detecting device comprising:
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a substrate; a fixed part connected to the substrate; a drive frame connected to the fixed part via a plurality of beams and provided so as to vibrate in a drive direction; and a Coriolis frame connected to the fixed part via the drive frame and provided so as to vibrate in a detect direction perpendicular to the drive direction, wherein the plurality of beams includes at least two groups of beams, each of the groups of beams having; a first beam extending in the detect direction and connected to the fixed part; a second beam extending in the drive direction and connected to the first beam; and a third beam extending in the detect direction and connected to the second beam and the drive frame, wherein the two groups of beams are provided symmetrically with respect to an axis extended in the drive direction and through the fixed part, and wherein the first beams of the two groups are connected to the fixed part between the first beams. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification