Charged particle beam device, control method for charged particle beam device, and cross-section processing observation apparatus

• US 9,368,323 B2
• Filed: 01/21/2015
• Issued: 06/14/2016
• Est. Priority Date: 01/23/2014
• Status: Active Grant

• Current Assignee: Hitachi High-Tech Science Corporation (Hitachi, Ltd.)
• Original Assignee: Hitachi High-Tech Science Corporation (Hitachi, Ltd.)
• Inventors: Uemoto, Atsushi, Man, Xin, Asahata, Tatsuya
• Primary Examiner(s): IPPOLITO, NICOLE MARIE
• Application Number:
  US14/601,497
• Publication Number:
  US 20150206702A1
• Time in Patent Office: 510 Days
• Field of Search: 250/305, 250/306, 250/307, 250/309, 250/310, 250/311
• US Class Current: 1/1
• CPC Class Codes: H01J 2237/15 Means for deflecting or directing discharge
• CPC Class Codes: H01J 2237/30483 Scanning
• CPC Class Codes: H01J 37/265 Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination

Abstract

A cross-section processing observation apparatus includes an ion beam control unit which controls a charged particle beam generation-focusing portion and a deflector, and a DAC which converts an input digital signal into an analog signal which is to be input to the deflector. A field-of-view setting portion sets a value of a field of view of a charged particle beam where the scanning performed by the deflector is performed on the basis of a set value of a slice amount, and the field-of-view setting portion is configured to set a value of one-nth of the slice amount, where n is a first natural number, as an input digital value “1” of the digital/analog converter and to set a value obtained by multiplying said value set as the input digital value “1” by a second natural number as a value of the field of view.

Claims

1. A charged particle beam device comprising:

a charged particle beam column comprising;

a charged particle beam generation-focusing portion configured to generate and focus a charged particle beam; and

a deflector configured to perform scanning with the charged particle beam in a two-dimensional direction;

a charged particle beam control unit, which is configured to control the charged particle beam generation-focusing portion and the deflector, and which comprises a digital/analog converter for converting an input digital signal into an analog signal that is to be input to the deflector; and

a field-of-view setting unit configured to set a value of a field of view of the charged particle beam where the scanning by the deflector is performed on the basis of a set value of a slice amount, the field-of-view setting unit being configured to set a value of one-nth of the slice amount, where n is a first natural number, as an input digital value “

1”

of the digital/analog converter and to set a value obtained by multiplying said value set as the input digital value “

1”

by a second natural number as a value of the field of view.

2. The charged particle beam device according to claim 1, further comprising:

a display unit for displaying a charged particle beam image with the field of view set by the field-of-view setting unit.

3. The charged particle beam device according to claim 1,

wherein the field-of-view setting unit is configured to switch:

a case where the value of one-nth of the slice amount is set as the input digital value “

1”

of the digital/analog converter, and the value obtained by multiplying said value set as the input digital value “

1”

by the second natural number is set as the value of the field of view; and

a case where the value of the field of view is set, and the slice amount calculated from said set value of the field of view is set as the input digital value “

1”

of the digital/analog converter, and

wherein the field-of-view setting unit is configured to set the value of the field of view of the charged particle beam by the scanning performed by the deflector and the slice amount.

4. A cross-section processing observation apparatus comprising:

the charged particle beam device according to claim 1; and

an observation device for observing a sample processed by the charged particle beam device.

5. A control method for a charged particle beam device that comprises a charged particle beam column comprising a charged particle beam generation-focusing portion configured to generate and focus a charged particle beam and a deflector configured to perform scanning with the charged particle beam in a two-dimensional direction;

a charged particle beam control unit that controls the charged particle beam generation-focusing portion and the deflector that and includes a digital/analog converter for converting an input digital signal into an analog signal that is to be input to the deflector; and

a field-of-view setting unit, the method comprising;

using the charged particle beam control unit to control the field-of-view setting unit to set a value of a field of view of a charged particle beam where the scanning by the deflector is performed on the basis of a set value of a slice amount; and

using the field-of-view setting unit to set a value of one-nth of the slice amount, where n is a first natural number, as an input digital value “

1”

of the digital/analog converter and to set a value obtained by multiplying said value set as the input digital value “

1”

by a second natural number as a value of the field of view.