MEMS component for generating pressure pulses

• US 9,369,809 B2
• Filed: 12/18/2013
• Issued: 06/14/2016
• Est. Priority Date: 12/18/2012
• Status: Active Grant

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Zoellin, Jochen, Ehrenpfordt, Ricardo, Scheben, Rolf
• Primary Examiner(s): Goins, Davetta W
• Assistant Examiner(s): Ojo, Oyesola C
• Application Number:
  US14/133,134
• Publication Number:
  US 20140169594A1
• Time in Patent Office: 909 Days
• Field of Search: 381/190
• US Class Current: 1/1
• CPC Class Codes: B06B 1/0292 Electrostatic transducers, e.g. electret-type
• CPC Class Codes: B81B 2201/0264 Pressure sensors
• CPC Class Codes: B81B 2203/05 Type of movement
• CPC Class Codes: B81B 5/00 Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
• CPC Class Codes: H04R 11/02 Loudspeakers
• CPC Class Codes: H04R 15/00 Magnetostrictive transducers magnetostrictive elements in general H10N30/00
• CPC Class Codes: H04R 17/00 Piezoelectric transducers; Electrostrictive transducers piezoelectric or electrostrictive elements in general H10N30/00; details of piezoelectric or electrostrictive motors, generators or positioners H10N30/00
• CPC Class Codes: H04R 19/005 using semiconductor materials
• CPC Class Codes: H04R 19/02 Loudspeakers H04R19/01 takes precedence
• CPC Class Codes: H04R 2201/003 Mems transducers or their use of the electrostatic type H04R19/005
• CPC Class Codes: H04R 2217/03 Parametric transducers where sound is generated or captured by the acoustic demodulation of amplitude modulated ultrasonic waves
• CPC Class Codes: H04R 2460/03 Aspects of the reduction of energy consumption in hearing devices
• CPC Class Codes: H04R 9/06 Loudspeakers

Abstract

A MEMS component for generating pressure pulses is provided, its micromechanical structure including at least three function levels: a first function level in which at least one stationary trench structure is implemented, a second function level, which is implemented above the first function level and includes at least one triggerable displacement element as well as through-openings as pressure outlet openings, the displacement element protruding into the trench structure and being movable in parallel with the function levels, whereby positive and negative pressure pulses are generated, and a third function level, which is implemented above the second function level and includes at least one triggerable cover element for at least one part of the pressure outlet openings in the second function level.

Claims

1. A MEMS component for generating pressure pulses, comprising:

a micromechanical structure including at least three function levels, wherein;

a first function level includes at least one stationary trench structure,

a second function level is implemented above the first function level and includes at least one triggerable displacement element and through-openings as pressure outlet openings, the displacement element protruding into the trench structure and being movable in parallel with the function levels, whereby positive and negative pressure pulses are generated, and

a third function level is implemented above the second function level and includes at least one triggerable cover element for at least one part of the pressure outlet openings in the second function level; and

a trigger arrangement, wherein the trigger arrangement and a suspension of the displacement element in the second function level permit one of a translatory movement and a rotatory movement in parallel to the function levels.

2. The MEMS component as recited in claim 1, further comprising vent openings formed in the first function level.

3. The MEMS component as recited in claim 1, wherein a triggering of the displacement element is at least one of electrostatic, piezoelectric, magnetostatic, and electromagnetic.

4. The MEMS component as recited in claim 1, wherein the displacement element is bar-shaped and a length and a height of the bar-shaped displacement element are coordinated with a length and a depth of the trench structure.

6. The MEMS component as recited in claim 1, wherein the trigger arrangement and a suspension of the cover element in the third function level are designed for an in-plane movement within the third function level.

7. The MEMS component as recited in claim 1, wherein the trigger arrangement and a suspension of the cover element in the third function level are designed for an out-of-plane movement perpendicular to the third function level.

8. The MEMS component as recited in claim 7, wherein the cover element includes a triggerable rocker structure suspended via a torsion spring structure in the third function level and deflectable out of the third function level.

5. A MEMS component for generating pressure pulses, comprising:

a micromechanical structure including at least three function levels, wherein;

a first function level includes at least one stationary trench structure,

a second function level is implemented above the first function level and includes at least one triggerable displacement element and through-openings as pressure outlet openings, the displacement element protruding into the trench structure and being movable in parallel with the function levels, whereby positive and negative pressure pulses are generated, and

a third function level is implemented above the second function level and includes at least one triggerable cover element for at least one part of the pressure outlet openings in the second function level; and

at least one spacer formed on at least one of the displacement element and the trench wall, the at least one spacer preventing the displacement element from adhering to the trench wall and ensuring a residual air cushion between the trench wall and the displacement element.